233 results about "Afm indentation" patented technology

It is an object of the present invention to provide a windowed polishing pad or a platen hole cover which is used to form planar surfaces in glass, semiconductors, dielectric/metal composites, integrated circuits, etc.; a polishing apparatus including the windowed polishing pad or the platen hole cover; a method for fabricating a semiconductor device using the polishing apparatus; and a polishing method, in which the number of scratches occurring on the surface of the substrate is small, and the polished state can be optically measured satisfactorily during polishing. In order to achieve the above object, a polishing pad is constructed in such a manner that the polishing pad includes a polishing layer and a light-transmissive window member disposed in an opening formed in a part of the polishing layer, wherein the amount of indentation strain measured when a constant load is applied to substantially the entire upper surface of the light-transmissive window member is larger than the amount of indentation strain measured when the same constant load is applied to a region having the same area on the upper surface of the polishing layer.

The invention relates to an in-situ micro-nano indentation/scratch test platform and a test method, and belongs to the field of electromechanical integrated precision scientific instruments. An X axis precision scratch unit and a Y axis large-stroke stick-slip drive scratch assembly are assembled at the tail of a base, a Z axis macro-movement adjusting mechanism is assembled at the middle of the base, a motor driving unit is assembled at the head of the base, a precision pressing driving and displacement signal detecting unit is installed on the Z axis macro-movement adjusting mechanism, and a precision three-axis force sensor used for detecting an indentation pressing force and a normal force and a tangential force of a scratch is installed on the X axis precision scratch unit. The in-situ micro-nano indentation/scratch test platform has the advantages of compact structure, miniaturization, integration, and capability of better ensuring the assembly precision, effectively improving the overall rigidity and dynamic properties and improving the overall test precision while overcoming the defect that an existing test platform cannot be used for quantitatively detecting the normal force and the tangential force in a scratch process.

The invention relates to a production technology of a planar high-purity molybdenum target material and discloses a method for producing a large high-purity molybdenum planar target material for flat panel displays, comprising the steps of: molybdenum powder analysis, powder selection, powder blending, die filling, pressing, sintering, rolling, annealing, width milling, wire cutting of end faces,chamfering and grinder machining. The planar high-purity molybdenum target material machined by the method has the following beneficial effects that: the length of the molybdenum target material can be up to 2700mm; the molybdenum content is greater than or equal to 99.95%; the relative density is greater than or equal to 99%; the grain structure is uniform; the flatness is less than 0.05; the surface roughness is Ra0.2; the surface is free of the defects such as flaws, peeling, folding, dents, metal or nonmetal pressed articles and the like; the lengths of internal flaws in the target material are not greater than 0.04mm; and no air bubbles and large crystals are generated.

A method and computer product program for determining Young's modulus. The method includes placing a probe in contact with a surface of a material on a substrate and, with an initial force of 800 nano newtons or less; determining the location of the surface relative to an initial indentation depth for the initial force; increasing the force on the probe from the initial force to a maximum force greater than the initial force to generate a load curve; decreasing the force on the probe from the maximum force to the initial force to generate an unload curve, the maximum force selected such that the unload curve is independent of the presence of the substrate; and using the unload curve, determining a relationship between (i) the reduced modulus of the sample material and (ii) the ratio of probe penetration depth and the thickness of the layer.

The invention relates to a metal-based composite material shearing strength testing method and a preparation method of a sample applied in the testing method. According to the principle, a micro-nano size cylinder containing a separate reinforcement-substrate interface is etched by means of focused ion beams, the reinforcement-substrate interface of the micro-nano size cylinder and the axial direction of the cylinder form a 45-degree angle, pressure is exerted on the top surface of the micro-nano size cylinder in the axial direction by using a nanoindentor, and the micro-nano size cylinder is compacted and deformed; in the process, the direction, forming 45 degrees with the compaction direction, of the reinforcement-substrate interface will bear the maximum shearing strength till the shear behavior occurs on the reinforcement-substrate interface, and the shearing strength of the reinforcement-substrate interface is calculated according to a stress-strain curve, recorded through the nanoindentor, of the micro-nano size cylinder.

A hardness testing method is characterized in that during hardness testing, a special testing pressure head with a plane end is used for applying load to an object to be tested, corresponding indentation is formed on the testing surface of the object to be tested, and the indentation and the added load are used as basis for hardness testing. The technical problem of hardness testing for representative multiple composites is solved creatively, and accordingly, different indentation area calculation modes and methods are developed by using a hardness testing system. The testing method is compatible and complementary with a traditional hardness testing method, so that testing (hardness) values obtained by using the methods can be compared, and a testing reference system is provided for hardness ratio of the composites to homogenous materials.

The invention belongs to the technical field of precise scientific instruments, and particularly relates to an online automatic detector for the mechanical parameters of the materials under the complex working conditions. The online automatic detector comprises a shell, and a precise indentation test unit, a base magnetic force moving unit, a material surface polishing unit and a guide rail driving unit which are arranged in the shell. The precision indentation testing unit and the material surface polishing unit are arranged on the guide rail driving unit and are in sliding fit with the guiderail driving unit, and the guide rail driving unit is fixed on the base magnetic moving unit. The online automatic detector for the mechanical parameters of the materials under the complex working conditions is simple in structure, can carry out the indentation test under service conditions, can accurately solve the mechanical parameters, such as material hardness, elastic modulus, yield strength, residual stress, fracture toughness, etc., and can solve the system errors caused by displacement and load detection units in complex environments.

The invention belongs to the technical field of characterization of mechanical properties of materials, and provides a method for realizing inversion identification of crystal plastic material parameters based on a nanoindentation experiment. The method comprises the steps that firstly, the elasticity modulus of a material is obtained through an Oliver-Parr method; secondly, a piecewise linear/power law hardening material model is utilized to establish a nanoindentation macroscopic parameter inversion model by combining MATLAB and ABAQUS, the actual nanoindentation experimental data is corrected by utilizing accumulation/subsidence parameters, and the macroscopic constitutive parameters of the indentation material are calculated by combining a Kriging agent model and a genetic algorithm; and finally, a polycrystalline finite element model of the tensile test piece based on the crystal plasticity finite element is established by combining MATLAB and ABAQUS, and the parameters of the crystal plastic material are calculated according to the constitutive parameters of the material in combination with the Kriging agent model and the genetic algorithm. Compared with the prior art, the method has the advantages that the accuracy of calculation data can be improved, the calculation amount is remarkably reduced and the calculation convergence is improved, and the method has very high practical value and reference significance in inversion identification of the crystal plastic material parameters.

The invention relates to a suspended rotary rapid positioning in-situ indentation/deepened arc indentation testing device and belongs to the field of mechanical and electronic integrated precise instruments. The device comprises a suspended rotary rapid positioning module, a deepened arc indentation testing module, a micro-nano indentation module and an in-situ observation module, wherein the micro-nano indentation module and the in-situ observation module are integrated on the suspended rotary rapid positioning module; the deepened arc indentation testing module is composed of an indentation tester and a test piece supporting platform together; and the test piece supporting platform is composed of two parts, namely a shear-type electric lifting table and an electric rotating platform. The device disclosed by the invention has the advantages that the device is novel in structure, has motor-driven rapid feed ability and micro-nano-level piezoelectric micro actuating ability, and can be used for accurately testing the hardness, elasticity modulus, scratching resistance and other mechanical property performances of the test materials. The loading displacement resolution reaches a micro-nano level, and the loading force resolution reaches a micro-Newton level. The effective test means is provided for mechanical behaviors and service behaviors of the materials.

The invention relates to the technical field of electronic packaging nanometer mechanical property testing, particularly to a porous material constitutive relation solving method based on a nanoindentation theory. According to the specific technical scheme, the method comprises the steps: carrying out indentation on a porous material matrix multiple times by using a nanoindenter to obtain a plurality of displacement-load curves, removing the curve with large error, carrying out average curve fitting on the rest curves to obtain an average curve, and taking the average elastic modulus of the average curve as an experimental elastic modulus E; then determining a characteristic stress sigma r, and determining a hardening index n according to a dimensionless function; determining characteristic strain epsilon r and yield stress sigma y; and finally obtaining a constitutive curve according to the hardening index n, the yield stress sigma y and the elastic modulus E. According to the method,the problems that in the prior art, material attributes and stress-strain curves are not in one-to-one correspondence, the number of iterations is large in the simulation process, and the consumed time is long are solved.

The invention relates to the field of materials, and provides a composite laminate impact response modeling method. The method comprises the following steps: calculating Hertz contact stiffness kc; acquiring the indentation depth hc of the composite material laminated plate, and calculating the contact load Fimp between the composite material laminated plate and an impacted object; employing a smooth particle dynamics SPH discretization method in a Lagrange form, and calculating the motion of the composite material laminated plate, and calculating the longitudinal acceleration of the punch. According to the relationship between the contact force and the indentation of the composite material laminated structure, the laminated plate impact response SPH model is established, the displacementchange of the laminated plate and the punch is analyzed, the damage form and the expansion mode of the laminated plate when the laminated plate is impacted are established, and the numerical monitoring of the impact response of the composite material layer is realized.

The invention relates to a method for the in-situ estimation of the tensile deformation of a rubber hyperelastic material based on a spherical indentation method and belongs to the technical field ofmaterial analysis and testing. The feasibility of practical application mainly depends on the nonlinear mechanical properties of the type of material. After the material is deformed, a contact area formed by spherical indentation is an ellipse, and the eccentricity of the ellipse is changed along with the change of a deformation state. In addition, since the material is stretched and hardened, theindentation modulus can be increased along with continuous stretching. Therefore, the deformation state of the material can be estimated according to the contact area eccentricity and the indentationmodulus measured by a spherical indentation experiment. The method is used for estimating the tensile deformation of the rubber hyperelastic material and is expansion and attempt of the indentation method in engineering practical application.

The invention discloses an in-situ micro-nano indentation/scratch test platform, and belongs to the technical field of test platforms. The in-situ micro-nano indentation/scratch test platform comprises a coarse adjustment device, a fine adjustment device and a transmission device; the coarse adjustment device comprises a base, an angle scale and a workbench; the angle scale is slidably connected to the top of the base through a precision slide rail; the workbench is slidably connected to the top of the angle scale; and a first turbine is fixedly mounted in the middle of the angle scale. According to the in-situ micro-nano indentation/scratch test platform, through the coarse adjustment device and the fine adjustment device, the test platform has the advantages of compact structure and high precision; through the matched arrangement of a first hand wheel and a fine adjustment knob, high-precision adjustment of sample positioning can be realized in the use process, angle and multi-directional test is realized, and therefore, the application range is widened, the practicability of the device is improved; the test platform is compact in structure and just occupies small space; and the test platform has the advantages of large stroke, high precision and compact structure.

The invention belongs to a manufacturing method of the thin wood board. The technique is to saw the slab, the short small material into rough board, plane the rough board into the board material with standard thickness, remove the raw edges and the two ends to form the square board, use roller press to press the upper and the lower faces of the square board along its longitudinal direction to form indentations with proper space and stagger upper and lower positions, use split machine and glue to cohesive the square boards with indentations into board core base, stick the press core boards on the upper and the lower faces of the board core base to get the rough base of the fine wood board, and go through usual processes of the manufacturing to get the super-thin wood board. Compared with the prior art, the invention saves the materials, and has smooth surface, good quality and low cost, and is suitable for the high-class furniture manufacturing.

To provide a combination of a cylinder made of a hypereutectic Al—Si alloy and a hard-carbon-coated piston ring both exhibiting excellent wear resistance, the piston ring is provided with a laminate coating at least on an outer peripheral sliding surface thereof; the laminate coating comprising a metal layer, a metal-containing, hard carbon layer, and a metal-free, hard carbon layer in this order from the substrate side; the laminate coating having Martens' hardness (indentation hardness) HMs of 5-13 GPa, indentation modulus E of 70-200 GPa, and a deformation ratio Rpe of 0.45 or less, which is expressed by a ratio (Wp/We) of plastic deformation energy Wp to elastic deformation energy We; and a ratio (Tmf/Tm) of the thickness Tmf of the metal-free, hard carbon layer to the thickness Tm of the metal-containing, hard carbon layer being 2-8.