The invention discloses a
pressure sensitive element resistant to high temperature
particle erosion, a preparation method thereof and a thin film
sputtering pressure sensor. The
pressure sensitive element includes an elastic base material and is in a flared convex elastic body structure, including a pressurized chamber, a body and An installation part; a
transition layer, an
insulation layer, a resistive film layer, a
passivation layer and a
metal layer are sequentially arranged on the installation part. The preparation method comprises sequentially preparing a
transition layer, an insulating layer, a resistive film layer, a
passivation layer and a
metal layer on the elastic base material. The
pressure sensitive element of the present invention has the advantages of good high
temperature resistance, strong
erosion /
impact resistance, long service life, wide application range, good reliability,
high strain sensitivity, etc., and its preparation method has the advantages of simple preparation process, convenient operation, low production cost, Short
production cycle and other advantages, the pressure sensitive element can be widely used in the preparation of
sputtering thin
film pressure sensors, has high use value and good application prospects.