462results about "Cathode sputtering application" patented technology

A fabrication process for a tunneling magnetoresistance (TMR) sensor is disclosed. In particular, a unique method of forming a barrier layer of the TMR sensor is utilized so that the TMR sensor exhibits good magnetic and TMR properties. In one particular example, the barrier layer is formed by depositing a metallic film in an argon gas in a DC magnetron sputtering module, depositing an oxygen-doped metallic film in mixed xenon and oxygen gases in an ion-beam sputtering module, and oxidizing these films in an oxygen gas in an oxygen treatment module. This three-step barrier layer formation process minimizes oxygen penetration into ferromagnetic (FM) sense and pinned layers of the TMR sensor and optimally controls oxygen doping into the barrier layer. As a result, the FM sense and pinned layers exhibit controlled magnetic properties, the barrier layer provides a low junction resistance-area product, and the TMR sensor exhibits a high TMR coefficient.

A radiofrequency device may include an electrically conducting element associated with at least one continuous magnetic element. The first continuous magnetic element may include a substrate coated with a magnetic film having a granular structure, with grains that are inclined to the normal to the substrate, or a columnar texture inclined to the normal of the substrate.

In the present inventive process for producing an R-Fe-B rare earth sintered magnet, first, there is prepared an R-Fe-B sintered magnet whose main phase consists of R2Fe14B compound crystal grains containing light rare earth element RL (at least one of Nd and Pr) as main rare earth element R. Subsequently, the sintered magnet body on its surface is coated with an RHM alloy layer composed of RH (wherein RH is one or two or more rare earth elements selected from among Dy, Ho and Tb) and metal M (wherein M is one or two or more metal elements selected from among Al, Cu, Co, Fe and Ag), the metal M forming RHM so as to induce a melting point lowering. Thereafter, heat treatment is carried out at 500 DEG to 1000 DEG C in vacuum or Ar atmosphere so as to cause the metal element M to diffuse from the surface into the internal portion of the sintered magnet and to cause the heavy rare earth element RH to diffuse from the surface into the internal portion of the rare earth sintered magnet body.

A CPP-GMR spin value sensor structure with an improved MR ratio and increased resistance is disclosed. All layers except certain pinned layers, copper spacers, and a Ta capping layer are oxygen doped by adding a partial O2 pressure to the Ar sputtering gas during deposition. Oxygen doped CoFe free and pinned layers are made slightly thicker to offset a small decrease in magnetic moment caused by the oxygen dopant. Incorporating oxygen in the MnPt AFM layer enhances the exchange bias strength. An insertion layer such as a nano-oxide layer is included in one or more of the free, pinned, and spacer layers to increase interfacial scattering. The thickness of all layers except the copper spacer may be increased to enhance bulk scattering. A CPP-GMR single or dual spin valve of the present invention has up to a threefold increase in resistance and a 2 to 3% increase in MR ratio.