The invention discloses a
surface plasmon excimer electrically-induced excitation source with a medium-
metal near field coupling structure. The
surface plasmon excimer electrically-induced excitation source comprises a substrate,
semiconductor quantum well epitaxial layer, a
metal layer and a
coupling output structure. The
semiconductor quantum well epitaxial layer is loaded on the surface of the substrate. The
metal layer is loaded on the surface of the
semiconductor quantum well epitaxial layer. The
coupling output structure is located in the metal layer. The invention further discloses a manufacturing method of the
surface plasmon excimer electrically-induced excitation source. The method includes the steps that the semiconductor
quantum well epitaxial layer is grown on the substrate; a device unit is etched on the grown semiconductor
quantum well epitaxial layer; the metal layer is deposited on the etched device unit; the
coupling output structure is manufactured in the deposited metal layer. According to the surface
plasmon excimer electrically-induced excitation source, the semiconductor
quantum well material is adopted to serve as an
active medium, based on the
near field coupling principle, the
quantum efficiency is high, the light emitting
wavelength range is wide, the excitation efficiency is high, the manufacturing process is simple, integration is conducted conveniently, and the surface
plasmon excimer electrically-induced excitation source and the manufacturing method have great research value and application prospects.