The invention discloses an
antimony selenide thin film preparation method and device. According to the method of the of the present invention, a
solid selenium source is evaporated in the cavity of agrowth chamber during a process of applying a
sputtering method to prepare an
antimony selenide thin film, so that on-line
selenium compensation can be realized, and therefore, the components of the thin film can be optimized; parameters such as temperature of the
evaporation of the
selenium source are adjusted, so that the chemical components of the
antimony selenide thin film can be adjusted tosatisfy a stoichiometric ratio, and therefore, the problem of the
selenium deficiency of the antimony selenide thin film prepared by the
sputtering method can be solved. The device of the present invention is provided with a
sputtering system and a thermal
evaporation system, wherein the sputtering
system and thermal
evaporation system are arranged in the growth chamber; the sputtering system is provided with a rotating substrate table, a sputtering target, a cooling system, an air intake system, a vacuum-pumping system and a
gas pressure detection system, wherein the rotating substrate tableis provided with a heating wire, the sputtering target is disposed under the substrate table, the rotating substrate table and the sputtering target are arranged in the growth chamber, the cooling system, the air intake system, the vacuum-pumping system and the
gas pressure detection system are disposed on the growth chamber; the thermal evaporation system is provided with a thermal evaporation
crucible for holding the
solid selenium source, wherein the thermal evaporation
crucible is arranged in the growth chamber.