The invention discloses a single-
chip magnetic sensor, and a
laser heating-assisted annealing apparatus thereof and a
laser heating-assisted annealing method thereof. The
laser heating-assisted annealing method comprises the following steps: (a), annealing is carried out on a
magnetic thin film in a strong
magnetic field, so that magnetic moments on a pinning layer of the
magnetic thin film are towards a same direction; (b), the
magnetic thin film is fixedly disposed on a clamp of a movable platform; (c), a
laser source is opened to emit a laser beam, which is attenuated through an
optical attenuator; the direction of the attenuated laser beam is changed through a reflective mirror; and the laser beam with the changed direction is focused into a
light spot by a focusing objective lens; (d), the movable platform is moved, in order that the focused
light spot of the laser beam is aimed at the magnetic thin film so as to enable the magnetic thin film to be heated by the laser beam; (e), a
magnetic field intensity of an
electromagnet arranged on the movable platform is adjusted, so that a
magnetic domain of the heating area of the magnetic thin film can be overturned; and (f), the magnetic thin film is
cut into slices, and the slices of the
cut magnetic thin film are bound into one.