The invention relates to a taper-controllable
laser micropore
machining light beam scanning device. The device comprises a
laser device and a sample piece to be machined, wherein a
beam expander is arranged on the emergent surface of the
laser device; a 45-degree reflecting mirror is arranged on the emergent surface of the
beam expander; a non-parallel double optical wedge group and a small-angle optical wedge are vertically distributed below the 45-degree reflecting mirror in sequence; a focusing mirror and the sample piece to be machined are vertically distributed below the small-angle optical wedge in sequence; and a laser beam is expanded and collimated by the
beam expander, is emitted to the 45-degree reflecting mirror, is reflected by the 45-degree reflecting mirror, is vertically emitted to the non-parallel double optical wedge group below the 45-degree reflecting mirror and is translated and deflected to a certain degree through the non-parallel double optical wedge group, and the deflected beam is refracted to the focusing mirror through the small-angle optical wedge, and is focused on the sample piece to be machined by the focusing mirror. Compared with a galvanometric scanning micropore
machining device, the device is high in accuracy; the number of the optical wedges is reduced by one, so that the device is convenient to
mount; the number of driving motors and wedge mirrors is reduced by one, so that the device is easy to control; and the loss of laser energy is reduced, and cost is greatly reduced.