The invention provides a location test system for defects of an integrated circuit and an implementation method thereof, belonging to the field of electronic test equipment, and relating to a system for locating and testing the defects of the integrated circuit and an implementation method thereof. The system mainly comprises a control analysis unit, a laser generator, a laser distribution device,a laser scanning device, an acoustic oscillation generator, an optical microscope device, a sample electrification module, a weak light detection device, a rated current voltage measurement device, arated voltage current measurement device, a damping platform, a darkroom case, and the like. Due to the adoption of the invention, the physical position of various defects of the integrated circuit can be located intuitively, and the defects of the integrated circuit can be found in time and accurately so as to improve the product quality, accelerate the speed of research and development and improve the production technique level.