The invention discloses an MEMS
thermopile infrared detector and a manufacturing method thereof, and the
infrared detector comprises: a substrate, which is provided with a heat insulation cavity; a supporting layer, which is formed on the upper surface of the substrate; a
thermopile unit, which is formed on the supporting layer and sequentially comprises a first
thermocouple layer, a first insulating layer and a second
thermocouple layer from bottom to top, wherein the first
thermocouple layer and the second thermocouple layer are connected through a first
contact hole in the first insulating layer; a second insulating layer, an
electromagnetic shielding layer and an
infrared absorption layer, which are sequentially formed on the
thermopile unit, wherein the infrared
absorption layer and the second insulating layer are partially etched to form a second
contact hole. According to the invention, the
electromagnetic shielding layer which can be grounded is arranged below the infrared
absorption layer, so that
electromagnetic shielding is realized, measurement errors are reduced, and the reliability of the
detector is improved; in addition, the electromagnetic shielding layer can reflect infrared
radiation generated by a detected object, and secondary absorption of the infrared absorption layer is facilitated, so that the infrared
absorption rate of the infrared absorption layer is improved, and the infrared
detection performance is enhanced.