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Pyroelectric detector based on current type relaxor ferroelectric single crystal and preparing method thereof

A technology of relaxor ferroelectric single crystal and pyroelectric detectors, which is applied in the direction of electric radiation detectors, can solve the problems of electrostatic damage of junction field effect tubes, achieve the shortening of power-on warm-up and signal stabilization time, and resist the external environment. The effect of strong noise interference ability and high response rate

Inactive Publication Date: 2017-05-31
北立传感器技术(武汉)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For example, if the temperature increases by 10°C, the electrostatic voltage at both ends of the highly insulated chip can reach hundreds of volts, which will cause great electrostatic damage to the JFET
[0006] To sum up, due to the advantages of structure and price, although the voltage mode has certain advantages in the early application, under the trend of high technical requirements and high application requirements, the voltage mode still has many limitations, and has a fast Response, high stability, and high responsivity pyroelectric detectors will surely become new development trends and key objects

Method used

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  • Pyroelectric detector based on current type relaxor ferroelectric single crystal and preparing method thereof
  • Pyroelectric detector based on current type relaxor ferroelectric single crystal and preparing method thereof
  • Pyroelectric detector based on current type relaxor ferroelectric single crystal and preparing method thereof

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Embodiment 1

[0051] Embodiment 1. A current-based relaxation ferroelectric single crystal pyroelectric detector. The following will combine figure 1 A current relaxation ferroelectric single crystal pyroelectric detector based on the present invention is introduced in detail.

[0052] Such as figure 1 As shown, a pyroelectric detector based on current relaxation ferroelectric single crystal, including a hollow package shell, a filter F, a sensitive element chip U p and circuit substrate 3.

[0053] The packaging package includes a tube cap 1 with an upper end closed and a lower end opening and a base 2, the filter F is embedded in a window opened at the upper end of the tube cap 1, and the lower end of the tube cap 1 is connected to the base 2 It is fixedly connected, and forms an internal hollow sealing structure with the base 2, the circuit substrate 3 is arranged on the base 2 and is located in the sealing structure, and the circuit substrate 3 is provided with a suspended support fr...

Embodiment 2

[0060] Embodiment 2. A preparation method of a ferroelectric single crystal pyroelectric detector based on current relaxation. The following will combine Figure 5 The preparation method of a current relaxation ferroelectric single crystal pyroelectric detector based on the present invention is introduced in detail.

[0061] Such as Figure 5Shown, a kind of preparation method based on amperometric relaxation ferroelectric single crystal pyroelectric detector comprises the following steps:

[0062] Step 1: Fabricate a sensitive element chip U using a relaxor ferroelectric single wafer p ;

[0063] Step 2: Fix the suspended support frame 4 on the circuit substrate 3 pre-set on the upper surface of the base 2, and then place the sensitive element chip U p fixed on the upper surface of the suspended support frame 4, so that the sensitive element chip U p electrically connected to the circuit substrate 3 through the suspended support frame 4;

[0064] Step 3: mount the ampli...

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Abstract

The invention relates to a pyroelectric detector based on current type relaxor ferroelectric single crystal. The pyroelectric detector comprises a hollow packaging tube shell, an optical filter, a sensitive element chip Up and a line substrate. The packaging tube shell comprises a tube cap and a base, the optical filter is embedded in a window formed in the upper surface of the tube cap, the lower end of the tube cap is fixedly connected with the base and forms a hollow seal structure with the base, the line substrate is arranged on the base and located in the seal structure, a suspension supporting frame is arranged on the line substrate, and the sensitive element chip Up is arranged on the upper surface of the suspension supporting frame and located under the optical filter; a feedback amplifying circuit is arranged on the line substrate, and the sensitive element chip Up is connected between the two input ends of the feedback amplifying circuit through the suspension supporting frame. The current type circuit is adopted, pyroelectric detector is high in capacity for resisting outside noise interference and capable of fast responding outside infrared radiation, and the time of startup preheating and signal stabilizing is shortened.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing technology, in particular to a current-based relaxation ferroelectric single crystal pyroelectric detector and a preparation method thereof. Background technique [0002] In nature, any object higher than the absolute temperature (-273k) will produce an infrared spectrum, and the wavelengths of infrared energy released by objects at different temperatures are different, so the infrared wavelength is related to the temperature, and the radiation energy The size is related to the surface temperature of the object. Pyroelectric detector is a detector based on the principle of infrared thermal radiation to detect people or objects by detecting infrared rays, widely used in radiation and non-contact temperature measurement, infrared spectrum measurement, laser parameter measurement, industrial automation Control, space technology, infrared camera. [0003] On the one hand, most co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J5/34
CPCG01J5/34
Inventor 李龙
Owner 北立传感器技术(武汉)有限公司
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