The invention discloses a terahertz
microbolometer based on a
metamaterial and a preparation method of the terahertz
microbolometer. The terahertz
microbolometer is composed of two parts including a
metamaterial terahertz absorber and a thermal
detector, wherein the thermal
detector comprises four
layers of materials, namely a microbridge supporting layer, a
thermistor film, a
metal electrode and a
passivation layer. The
metamaterial terahertz absorber comprises three
layers of materials, namely a bottom-layer
metal film, an intermediate medium layer and a top-layer
metal film. According to the terahertz microbolometer, the metamaterial terahertz absorber and the thermal
detector are integrated, heat generated by the metamaterial absorbing
terahertz radiation is transmitted to the thermal detector, and then, the electrical property of the
thermistor film is changed, so that the terahertz room-temperature detecting and imaging are realized. Due to the adoption of the microbridge structure and the preparation method disclosed by the invention, the problems of microbridge deformation caused by adding the metamaterial and the like are solved, and the microbolometer is high in
mechanical stability and terahertz absorptivity. The defect that terahertz
waves are difficultly detected by using the traditional microbolometer is overcome; and the terahertz microbolometer is prepared by using the traditional micromachining technology so as to be suitable for industrial production.