332 results about "Bolometer" patented technology

The invention concerns an electromagnetic radiation sensing device with integrated housing including two superimposed sensors. A first sensor detects one first wavelength range, and a second sensor detects a second wavelength range. The first sensor is arranged inside a protective housing, whereof at least the upper wall includes the second sensor. The wavelengths of the first range, for example included in the infrared domain are, preferably, greater than the wavelengths of the second range, which can be included in the visible or ultraviolet domain. The first sensor is, preferably, a bolometer comprising a sensitive elements and support element forming electrical connection elements between the first sensor and/or the second sensor and an electronic processing circuit.

A method for manufacturing a sensing device, such as a bolometer device or other devices. The method includes providing a substrate, e.g., silicon wafer. The method includes forming a first reflection layer overlying the substrate and forming a first electrode layer overlying the substrate. The method includes forming a sacrificial layer overlying a portion of the first reflection layer and a portion of the first electrode layer. The sacrificial layer is patterned using photolithography techniques. The patterned sacrificial layer corresponds to a cavity region. The method also forms a second electrode layer overlying the sacrificial layer and forms an elastic layer overlying the patterned sacrificial layer. The elastic layer encloses the cavity region corresponding to the patterned sacrificial layer. The method releases the sacrificial layer to form an opening in the cavity region.

The invention provides a terahertz radiation detector. The terahertz radiation detector comprises a terahertz sensitive structure and a substrate chip including a reading circuit, wherein the terahertz sensitive structure comprises a terahertz absorption structure, a heat conversion layer and a protection layer, when passive/active terahertz waves are focused on the terahertz sensitive structure through a terahertz object lens, absorbed energy is converted into heat energy through the terahertz absorption structure, the heat energy is converted into an electric signal through the heat conversion layer, and the electric signal is read through the reading circuit on the substrate chip. According to the terahertz radiation detector, a terahertz micro-bolometer micro-bolometer operates under a non-refrigeration environment, single point detection can be carried out, terahertz imaging can further be realized through a focal plane array.

The invention provides a detector comprising a metamaterial absorber and a micro-bolometer arranged to detect terahertz (THz) radiation. The metamaterial absorber can absorb multiple frequency bands, from the infrared and the THz regions of the electromagnetic spectrum. The detector is scalable to be suitable for use in a focal plane array.

The invention also provides a hybrid of a plasmonic filter, e.g. for optical radiation, and a metamaterial absorber for terahertz (and/or infrared) radiation, to create a single material capable of absorbing narrow band terahertz radiation and filtering radiation in another part of the spectrum, e.g. optical radiation. Such material has great potential in future imaging technology where hybridisation can maximise the spectral information density of an optical system.

A method and apparatus for protecting a bolometer antenna imaging array from out of band electromagnetic energy is disclosed. Protective pads are disposed upon a window in an optical system forming a millimeter wave image on an array of bolometer antenna sensors. The protective pads are effectively opaque to infrared and visible emissions and are aligned to shade the bolometer portion of the bolometer antennas from infrared and visible emissions, while leaving the antenna portion of each sensor in the array exposed to intercept the millimeter wave energy incident upon them.

The present invention relates to a bolometer, and more specifically to a compensation circuit for compensating non-uniformity due to the difference of operating temperature between bolometers which exist in bolometer array using semiconductor material. A compensation circuit according to the present invention comprises a biasing part including a first transistor generating bias current according to the change of operating temperature to have a dependency of exponential function for the operating temperature of circuit, and a second transistor turned on/off according to the column signal of a bolometer array; a bolometer part including a variable resistor for detecting IR in a pixel base, a third transistor turned on/off according to the column signal of a bolometer array coupled to one end of the variable resistor, and a fourth transistor turned on/off according to the row signal of a bolometer array coupled to the other end of the variable resistor; and an off-set compensation part for compensating the non-uniformity of the bolometer unit.

Adjacent pixels of an infrared focal plane array (IR FPA) can be configured to have different spectral or polarization responses by adjustment of the lengths or orientations of the antenna arms which couple radiation into the sensors. The manufacturing costs of such an antenna-coupled IR FPA would be much less than integration of spectral or polarization filters onto each pixel, or fabrication of adjacent pixels with materials of different bandgaps. The antenna-coupled pixels can be made smaller than usual pixels, allowing this diversity of spectral or polarization information on the FPA without losing spatial resolution. The infrared (IR) sensors can be tunnel diodes, schottky diodes, photovoltaics, photoconductors, bolometers, and pyroelectrics. Application areas can include military and civilian remote sensing, automotive driving aids, industrial sensing, medical imaging, and general surveillance.

A bolometer has a semiconductor membrane having a single-crystalline portion, and spacers so as to keep the semiconductor membrane at a predetermined distance from an underlying substrate. The complementarily doped regions of the single-crystalline portion form a diode and the predetermined distance corresponds to a fourth of an infrared wavelength.

In a micro-bridge structure in which a temperature detecting portion (diaphragm) including a bolometer thin film is supported by a supporting portion in a state floated from a circuit substrate, a reflective film reflecting a THz wave is formed on the circuit substrate, an absorbing film absorbing the THz wave is formed on the temperature detecting portion, and an optical resonance structure is formed by the reflective film and temperature detecting portion. A gap between the reflective film and temperature detecting portion measures approximately ¼ infrared wavelength (e.g., 1.5 to 2.5 μm). Sheet resistance of the temperature detecting portion is set in a range in which an absorptance of the THz wave becomes a predetermined value or above on the basis of the THz wave (approximately 10-100 Ω/sq.). The absorptance of the THz wave is drastically improved while using the structure and manufacturing technique of a bolometer-type infrared detector.

A multispectral sensor which includes a complementary metal oxide semiconductor substrate having a switching circuit, at least one antenna-receiving combination device for detecting terahertz radiation, at least one additional bolometer for detecting mid-range infrared radiation, and at least one diode for detecting radiation in the visible to near-infrared range. A multispectral imaging and/or spectroscopy system, a method for detecting and/or examining life forms, objects, and materials using such a system, and the use of such a sensor and system are also described.

A bolometer having decreased noise and increased temperature sensitivity and a method of manufacturing the same are provided. The bolometer has a resistive layer formed of single crystalline silicon (Si) or silicon germanium (Si_1-xGe_x, x=0.2˜0.5) having high crystallinity, such that 1/f noise can be reduced and temperature sensitivity can be significantly improved compared to a conventional amorphous silicon bolometer.

Provided are an image sensor for detecting a wide spectrum, including a plurality of infrared ray receiving layers which individually receive infrared rays having different wavelengths for each pixel, the plurality of infrared ray receiving layers stacked to each other, and a manufacturing method thereof. The image sensor, which is an integrated image sensor where at least two micro bolometers are stacked, acquires spectrum information about visible rays and near-infrared rays as well as two or more infrared rays applied on an object, without mechanical/thermal/optical distortion, and provides the spectrum information to a silicon-based semiconductor such as a photodiode, thereby improving photoelectric conversion efficiency.

Provided are a bolometer structure, an infrared detection pixel employing the bolometer structure, and a method of fabricating the infrared detection pixel.

The infrared detection pixel includes a substrate including a read-out integrated circuit (ROIC) and on which a reflection layer for reflecting infrared light is stacked, a bolometer structure formed to be spaced apart from the substrate and including a temperature-sensitive resistive layer, a first metal layer formed in a pattern on one surface of the temperature-sensitive resistive layer, a second metal layer formed in a pattern complementary to the pattern of the first metal layer on the other surface of the temperature-sensitive resistive layer in order to complementarily absorb infrared light, and an insulating layer formed between the temperature-sensitive resistive layer and the first metal layer, and a metal pad receiving a change in resistance of the temperature-sensitive resistive layer according to infrared light absorbed by the first metal layer and the second metal layer from the second metal layer, and transferring the change in resistance to the ROIC.

Thus, it is possible to improve responsivity, and implement a simple bolometer structure robust against stress. Consequently, process yield can be improved, and the volume, weight, price, etc., of application products can be reduced by reducing the volume of a bolometer structure.

The system (10) includes a first mechanism (12) for receiving electromagnetic energy of a first wavelength from the scene (28) and providing electromagnetic energy of a second wavelength shorter than the first wavelength. A second mechanism (14) measures variations of the electromagnetic energy of the second wavelength over a predetermined area. The system is a millimeter wave imaging system (10). The first mechanism (12) includes a lens (12) having an index of refraction substantially greater than 1. The lens (12) is opaque to infrared electromagnetic energy and made of alumina, plastic, or other material having a relatively high index of refraction. The second mechanism (24) includes and array of bolometers (24) positioned parallel to an output aperture (24) of the lens and within a distance of the output aperture (24) that is much smaller than the second wavelength. A video controller (16), a computer (18), process video signals output from the array of bolometers (14) to yield an image, which is displayed on a display (20).

The invention relates to a device for the detection of an electromagnetic radiation including: a substrate; a resistive imaging bolometer; a circuit for polarizing the bolometer at a predetermined voltage; a rejection circuit generating a common mode current, comprising a compensation bolometer thermalized in the substrate and a polarization circuit thereof; and a measuring circuit for measuring the difference between the current flowing in the imaging bolometer when it is polarized and the common mode current generated by the rejection circuit. According to the invention, the rejection circuit further comprises a current generator capable of producing a current that simulates the current induced by the self-heating of the imaging bolometer under the effect of its polarization, the sum of the current passing through the compensation bolometer and the current generated by the current generator forming the common mode current.

The invention discloses a terahertz or infrared micro-bolometer, which comprises a micro-bridge structure of a micro-bolometer for an uncooled terahertz detector or an uncooled infrared detector, wherein a thermistor material and a light absorbing material in the micro-bridge structure are one of a vanadium oxide-fullerene binary composite thin film or a vanadium oxide-fullerene-carbon nanotube ternary composite thin film. The vanadium oxide composite film is formed by compounding two-dimensional vanadium oxide and zero-dimension fullerene components or two-dimensional vanadium oxide, zero-dimension fullerene and one-dimensional carbon nanotube components. The micro-bolometer and a manufacturing method thereof can overcome the defects existing in the prior art and are suitable for large-scale industrial production; and the working performance of the device is improved.

The present invention relates to an oxide thin film for a bolometer-type uncooled infrared detector having high sensitivity. A vanadium tungsten oxide (V—W—O_x), i.e. a tungsten-doped vanadium oxide, is provided as an oxide film for a bolometer. An oxide for bolometer having characteristics of low resistance of 5 to 200 kΩ and variable TCR between −1.5 and −4.1%/° C. can be obtained by an oxidation of vanadium-tungsten metal film at a low temperature around 300° C., with changing a tungsten content and oxidation time. And a reproducible thin film can be fabricated by low price equipment for thin film deposition, without expensive ion beam or laser apparatus. Accordingly, an oxide for bolometer having characteristics of resistance lower than 100 kΩ and TCR higher than −3%/° C. can be obtained with reproducibility, whereby an uncooled-type infrared detector having high sensitivity can be fabricated.