1289 results about "Wafer-level packaging" patented technology

A method of forming a package structure with reduced damage to semiconductor dies is provided. The method includes providing a die comprising bond pads on a top surface of the die; forming bumps on the bond pads of the die, wherein the bumps have top surfaces higher than the top surface of the die; mounting the die on a chip carrier, wherein the bumps are attached to the chip carrier; molding the die onto the chip carrier with a molding compound; de-mounting the chip carrier from the die; and forming redistribution traces over, and electrically connected to, the bumps of the die.

A ferroelectric loaded waveguide resonator capable of operation at microwave, millimeter-wave and higher frequencies and suitable for integration into a three-dimensional monolithic microwave integrated circuit (3D MMIC) is disclosed. The resonator includes a resonator cavity, which, in one form of the invention, is formed by two parallel metal layers and a metallized wall structure extending between the metal layers. The cavity is filled with dielectric material and includes a layer of ferroelectric material, which is used to control the resonant frequency by varying a voltage bias applied to the ferroelectric layer. The cavity includes a slot in one of the metal layers and a coupling strip formed adjacent to the slot to provide electromagnetic coupling to other components, such as a voltage controlled oscillator (VCO). The invention can also be applied to other multi-metal semiconductor or wafer level packaging technologies.

The present invention relates to semiconductor device manufacturing techniques, and specifically to a field of device packaging techniques at wafer level. More specifically, it relates to a cap wafer for wafer bonding application that is bonded to top part of a device wafer. The method of the present invention excludes the use of deep reactive ion etching of silicon to form a through silicon via. The present invention provides a method for the preparation of cap wafer for wafer bonding application with a simple process of through silicon via interconnection and a wafer level packaging method using the same.

A through-wafer interconnect for imager, memory and other integrated circuit applications is disclosed, thereby eliminating the need for wire bonding, making devices incorporating such interconnects stackable and enabling wafer level packaging for imager devices. Further, a smaller and more reliable die package is achieved and circuit parasitics (e.g., L and R) are reduced due to the reduced signal path lengths.

A method of forming an electronic component package includes coupling a first surface of an electronic component to a first surface of a first dielectric strip, the electronic component comprising bond pads on the first surface; forming first via apertures through the first dielectric strip to expose the bond pads; and filling the first via apertures with an electrically conductive material to form first vias electrically coupled to the bond pads. The bond pads are directly connected to the corresponding first vias without the use of a solder and without the need to form a solder wetting layer on the bond pads.

A method of forming an electronic component package includes coupling a first surface of an electronic component to a first surface of a first dielectric strip, the electronic component comprising bond pads on the first surface; forming first via apertures through the first dielectric strip to expose the bond pads; and filling the first via apertures with an electrically conductive material to form first vias electrically coupled to the bond pads. The bond pads are directly connected to the corresponding first vias without the use of a solder and without the need to form a solder wetting layer on the bond pads.

There are many inventions described and illustrated herein. In one aspect, the present invention is directed to a temperature compensated microelectromechanical resonator as well as fabricating, manufacturing, providing and / or controlling microelectromechanical resonators having mechanical structures that include integrated heating and / or temperature sensing elements. In another aspect, the present invention is directed to fabricate, manufacture, provide and / or control microelectromechanical resonators having mechanical structures that are encapsulated using thin film or wafer level encapsulation techniques in a chamber, and including heating and / or temperature sensing elements disposed in the chamber, on the chamber and / or integrated within the mechanical structures. Other aspects of the inventions will be apparent from the detailed description and claims herein.

A method for manufacturing a hetero-bonded wafer having a large mismatch of thermal expansion coefficient comprises forming a wafer bonding means and an electrical interconnection means on at least one bonding surface of two wafers to be bonded with each other, forming grooves in the bonding surface of one wafer along dicing lines with an interval between the grooves being equal to or an even multiple of a die width, bonding the two wafers at a temperature less than 200° C., thinning a back side of the grooved wafer such that at least a portion of the grooves is exposed, and rebonding the bonded wafer pair at an elevated temperature higher than the first bonding temperature. The method for manufacturing a hetero-bonded wafer can avoid wafer level bow / warp and also reduce debonding and cracking in individual segments induced by thermal stress due to a mismatch of thermal expansion coefficient. Embodiments of the method are useful for wafer level packaging and the fabrication of hybrid devices by heterogeneous wafer bonding.

A carrier for use in a chip-scale package, including a semiconductor substrate, such as a semiconductor wafer, with a plurality of apertures formed therethrough. The present invention also includes a chip-scale package including the carrier. When the carrier is employed in such a package, a semiconductor device or a wafer including a plurality of semiconductor devices thereon is invertedly aligned with and disposed over the carrier so that bond pads of the semiconductor device or semiconductor devices substantially align with apertures through the semiconductor substrate. The chip-scale package also includes conductive material disposed in each of the apertures of the semiconductor substrate to form vias through the semiconductor substrate. Conductive traces may extend substantially laterally from selected vias. The chip-scale package may also include a contact or conductive bump disposed in communication with each via. An intermediate layer may be disposed between the semiconductor device and the semiconductor substrate. The intermediate layer may secure the semiconductor device to the semiconductor substrate and insulate structures of the semiconductor device. An insulative layer may be disposed on the semiconductor substrate opposite the semiconductor device. If the chip-scale package includes an intermediate layer or an insulative layer, the electrically conductive vias that extend through the semiconductor substrate are preferably exposed through such layers. The present invention also includes methods of fabricating the semiconductor substrate and assembling a chip-scale package of the invention, including substantially simultaneously assembling semiconductor devices and carrier substrates on a wafer-scale and singulating individual chip-scale packages from the assembled wafers.

The present invention provides a wafer level package of micro electromechanical devices. The wafer level package of the present invention comprises a wafer having a plurality of micro electromechanical devices and a package wafer of the same size. A plurality of conductor plugs penetrate through the upper and lower surfaces of the package wafer. Solder bumps are formed on the conductor plugs to be adhered to predetermined solder bumps on the micro electromechanical device wafer so as to form a package device. The wafer level package of the present invention can prevent micro electromechanical devices from damage during the packaging procedure.

To pick and place standard dice on a new base for obtaining an appropriate and wider distance between dice than the original distance of dice on a wafer. The package structure has a larger size of balls array than the size of the die by fan out type wafer level package. Moreover, the die may be packaged with passive components or other dice with a side by side structure or a stacking structure.