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Graphene oxide assisted infrared thermopile detector

A thermopile detector and thermopile technology, which are applied in the directions of thermoelectric devices, electric radiation detectors, thermoelectric device components, etc., can solve the problems of low sensitivity, poor compatibility of micromechanical technology, and low efficiency.

Inactive Publication Date: 2021-04-09
EAST CHINA NORMAL UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

For example, black gold with high infrared absorption rate is used as the absorption layer, but the preparation process of black gold is cumbersome, the cost is high, the adhesion is poor, and the compatibility with the micromechanical process is poor; adding an anti-reflection layer germanium layer to the absorption layer also improves the infrared absorption. rate, but not very efficiently
Although the above-mentioned materials can enhance the absorptivity in the infrared absorption region to a certain extent, due to compatibility and efficiency defects, the responsivity is difficult to meet the requirements, making the sensitivity low

Method used

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  • Graphene oxide assisted infrared thermopile detector
  • Graphene oxide assisted infrared thermopile detector
  • Graphene oxide assisted infrared thermopile detector

Examples

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Embodiment 1

[0053] like figure 1 As shown, the infrared thermopile detector structure of this embodiment includes a substrate 1, a dielectric support layer 2, a metal electrode 6, an infrared absorption layer 7, a graphene oxide film 8 and a thermopile assembly 9;

[0054] The top view structure diagram of its infrared thermopile detector is as follows: figure 2 shown, from figure 2 It can be seen that a graphene oxide film is arranged on the infrared absorbing layer of the infrared thermopile detector;

[0055] The substrate 1 is a monocrystalline silicon substrate with a thickness of 2000 μm; the dielectric support layer 2 is a silicon dioxide film with a thickness of 800 nm; the first thermocouple strip 3 is a polysilicon thermocouple strip with a thickness of 600 nm; The second thermocouple strip 5 is an aluminum thermocouple strip with a thickness of 500nm; the electrical insulation layer 4 is a silicon dioxide electrical insulation layer with a thickness of 500nm; the metal elec...

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Abstract

The invention provides a graphene oxide assisted infrared thermopile detector. A graphene oxide film is arranged on an infrared absorption layer of the infrared thermopile detector. According to the invention, the graphene oxide film is arranged on the infrared absorption layer of the infrared thermopile detector, and the infrared absorption rate is improved by utilizing the characteristics of low insulation and heat conduction and strong infrared absorption of the graphene oxide film, so that the sensitivity of the infrared thermopile detector is improved. The result of the embodiment shows that compared with an infrared thermopile detector without a graphene oxide film, the infrared absorption capacity of the infrared thermopile detector is improved by 61.1%, and the response rate is improved by 89.9%.

Description

technical field [0001] The invention belongs to the technical field of infrared thermopile detectors, in particular to an infrared thermopile detector assisted by graphene oxide. Background technique [0002] In 2020, the new coronavirus is widely spread in many countries around the world. The "red" products that penetrate the world are all kinds of anti-epidemic temperature measuring instruments, and the core device is the infrared detector. In essence, infrared detection is a A radiant energy conversion technology that converts received infrared radiant energy into other forms of energy that are easy to measure or observe. Infrared detectors are usually divided into thermal detectors and photon detectors. Compared with photon detectors, thermal detectors have the advantages of low price, small size, no refrigeration, and mature technology. [0003] As a kind of thermal detector, infrared thermopile detector can realize non-contact temperature measurement with high sensiti...

Claims

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Application Information

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IPC IPC(8): G01J5/12H01L35/32H01L35/10H10N10/17H10N10/82
CPCG01J5/12H10N10/82H10N19/101
Inventor 吴幸梁芳毕恒昌
Owner EAST CHINA NORMAL UNIV
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