The invention discloses a surface treatment method after nitride material laser lift-off. The surface treatment method comprises the following steps: preparing a nitride composite substrate or a nitride single crystal substrate in a laser lift-off manner; selecting a cavity, enabling the cavity to be filled with a volatile corrosive liquid, putting the nitride composite substrate or the nitride single crystal substrate above a liquid level in the cavity, sealing the cavity so that a closed cavity is formed, standing for a period of scheduled time T, and using an atmosphere generated by volatilization of the corrosive liquid to carry out corrosion treatment on the surface, after laser lift-off, of the nitride composite substrate or the nitride single crystal substrate; cleaning and drying the nitride composite substrate or the nitride single crystal substrate in the cavity to complete atmosphere corrosion treatment on the surface after laser lift-off. A nitride surface after lift-off is treated by using an atmosphere corrosion method, the impurities such as residual metals on the surface after lift-off are removed, the ingredients and roughness of the surface after lift-off are improved, and the later-period homoepitaxy effect and chip performance are improved.