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2701 results about "Feed point" patented technology

Capacitively coupled plasma reactor with uniform radial distribution of plasma

A plasma reactor for processing a semiconductor wafer includes a side wall and an overhead ceiling defining a chamber, a workpiece support cathode within the chamber having a working surface facing the ceiling for supporting a semiconductor workpiece, process gas inlets for introducing a process gas into the chamber and an RF bias power generator having a bias power frequency. There is a bias power feed point at the working surface and an RF conductor is connected between the RF bias power generator and the bias power feed point at the working surface. A dielectric sleeve surrounds a portion of the RF conductor, the sleeve having an axial length along the RF conductor, a dielectric constant and an axial location along the RF conductor, the length, dielectric constant and location of the sleeve being such that the sleeve provides a reactance that enhances plasma ion density uniformity over the working surface. In accordance with a further aspect, the reactor can include an annular RF coupling ring having an inner diameter corresponding generally to a periphery of the workpiece, the RF coupling ring extending a sufficient portion of a distance between the working surface and the overhead electrode to enhance plasma ion density near a periphery of the workpiece.
Owner:APPLIED MATERIALS INC

RF MEMs-tuned slot antenna and a method of making same

A slot antenna for receiving and / or transmitting a RF signal at a desired one of a plurality of different frequencies. The slot antenna includes at least one conductive sheet having a slot defined therein, the slot being longer than it is wide and having at least one end which is open. A plurality of switch members are mounted along said slot close to the open end thereof, each of said plurality of switch members acting, when closed, to couple the at least one conductive sheet on one side of said slot to the at least one conductive sheet on a second side thereof. A feed point is provided for adjacent said slot. The plurality of switch members are closable in a controlled manner to change a desired resonance frequency at which the slot antenna receives and / or transmits the RF signal.
Owner:HRL LAB
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