The invention discloses an omni-directional dynamic heat source
pendulum type double-shaft micro-mechanical
accelerometer and a
processing method thereof, the double-shaft micro-mechanical
accelerometer comprises a substrate layer, a sensitive layer and a cover plate, the sensitive layer comprises a middle heating cavity and a middle detection cavity, and the upper surface of the sensitive layer is provided with an omni-directional dynamic heat source
pendulum heater and two pairs of thermistors; the omni-directional dynamic heat source
pendulum heater is suspended at the central position of the sensitive layer through six completely symmetrical semicircular supporting beams; the heater is electrified in a
constant current mode; and a groove is etched on the cover plate and is hermetically connected with the upper surface of the sensitive layer. The omni-directional dynamic heat source pendulum type double-shaft micro-mechanical
accelerometer can realize biaxial acceleration measurement, has the characteristics of high sensitivity, high response speed, small
structural stress, small size, light weight, easiness in intelligentization and integration and the like, and conforms to the development direction of the sensor towards microminiaturization, integration and intelligence. Meanwhile, the omni-directional dynamic heat source pendulum type double-shaft micro-mechanical accelerometer has the advantages of being very simple in structure and
processing technology, very low in cost, high in reliability, excellent in vibration resistance and
impact resistance and the like.