A High Performance Piezoelectric Accelerometer with Ring Beam Structure

Abstract

The invention provides a high-performance piezoelectric accelerometer with a ring beam structure, which includes a ring beam structure, a piezoelectric element, an upper casing and a lower casing. The ring beam structure includes an integrally arranged ring beam, a plurality of elastic beam arms and a central substrate. The central base plate is arranged at the center of the ring beam, and a plurality of elastic beam arms are evenly arranged in the ring beam. The central base plate is a regular N-gon base plate, and an elastic beam arm is matched on each side of the central base plate, and each elastic beam The other end of the elastic beam is fixedly connected with the inner wall of the ring beam, and the upper and lower surfaces of the central base plate are equipped with a central mass block of the same shape. Piezoelectric elements are arranged on the upper and lower surfaces of each elastic beam arm, and the upper shell and the lower shell are surrounded by an accommodating ring beam. The structural cavity, the upper shell and the lower shell clamp the ring beam set. The invention utilizes the bending mode of the beam to improve the sensitivity; the high symmetry not only improves the bandwidth without loss of performance, but also improves the anti-torsion force and anti-interference ability.

Description

technical field [0001] The invention belongs to the field of vibration sensors, in particular to a high-performance piezoelectric accelerometer with a ring beam structure. Background technique [0002] Accelerometers are a class of inertial sensors based on a mass-spring-damper system. When the system vibrates, the mass exerts a load on the spring, so by measuring the deformation of the elastic body, acceleration information can be obtained. Accelerometers are divided into piezoelectric, piezoresistive, or capacitive types according to sensitive elements, among which piezoelectric accelerometers are the most widely used. The piezoelectric accelerometer uses the piezoelectric effect of the active material to combine the piezoelectric element with the elastic body. When the inertial mass is subjected to mechanical force, the force applied to the piezoelectric element will also change through the deformation of the elastic body, so that Electric charge is generated on its sur...

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Problems solved by technology

However, these characteristics can hardly be obtained from the same commercial accelerometer, and there is an urgent need to invent a dedicated high-performance piezoelectric accelerometer to meet the needs of vector sensors

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