The invention provides a method for preparing a
nitrogen aluminum co-
doping p type
zinc oxide thin film. The method comprises the following steps that S1, high-purity
zinc serves as a target material, a high-purity aluminum piece is placed on the target face, a substrate is placed above the target material, the distance between the substrate and the target material is adjustable, high-purity
nitrogen gas is led to carry out
radio frequency magnetron reactive
sputtering, and the aluminum-contained
zinc nitride thin film obtained through preparation serves as a precursor; S2, after the precursor is prepared, vacuumizing is carried out, high-purity
oxygen is led to carry out in-situ low-pressure oxidization on a precursor thin film, and the
nitrogen aluminum co-
doping p type zinc
oxide thin film is obtained through preparation. According to the method, on the premise that the performance of the precursor is optimized, the content of
active nitrogen in the thin film is improved, and therefore the concentration and the migration rate of a hole carrier are increased, the resistance rate of the zinc
oxide thin film is reduced, the resistance rate of the obtained zinc oxide thin film is reduced to 10.84W*cm, the concentration of the carrier reaches +4.65*1018cm-3, an optical
band gap is 3.27 eV, and the crystalline state and the
optical property of the thin film are good.