97 results about "Nanoelectromechanical systems" patented technology

A stacked die package for an electromechanical resonator system includes a chip that contains an electromechanical resonator bonded onto the control chip for the electromechanical resonator by a thermally and / or electrically conductive epoxy. In various embodiments, the electromechanical resonator can be a micro-electromechanical system (MEMS) resonator or a nano-electromechanical system (NEMS) resonator. Packaging configurations that may include the chip that contains the electromechanical resonator and the control chip include chip-on-lead (COL), chip-on-paddle (COP), and chip-on-tape (COT) packages. The stacked die package provides small package footprint and / or low package thickness, as well as low thermal resistance and a robust conductive path between the chip that contains the electromechanical resonator and the control chip.

Nanoelectromechanical systems utilizing nanometer-scale assemblies are provided that convert thermal energy into another form of energy that can be used to perform useful work at a macroscopic level. These systems may be used to, for example, produce useful quantities of electric or mechanical energy, heat or cool an external substance or propel an object in a controllable direction. In particular, the present invention includes nanometer-scale beams that reduce the velocity of working substance molecules that collide with this nanometer-scale beam by converting some of the kinetic energy of a colliding molecule into kinetic energy of the nanometer-scale beam. In embodiments that operate without a working substance, the thermal vibrations of the beam itself create the necessary beam motion. In some embodiments, an automatic switch is added to realize a regulator such that the nanometer-scale beams only deliver voltages that exceed a particular amount. Various devices including, piezoelectric, electromagnetic and electromotive force generators, are used to convert the kinetic energy of the nanometer-scale beam into electromagnetic, electric or thermal energy. Systems in which the output energy of millions of these devices is efficiently summed together are also disclosed as well as systems that include nanometer-scale transistors.

A system, device, method, and apparatus provide the ability to wire a voltage sensitive device to a nanoelectromechanical system (NEMS) resonator. A voltage sensitive device is configured to detect one or more voltage signals and output one or more electrical potentials in real-time. An array of piezoelectric NEMS resonators (with each resonator tuned to a unique frequency) is used to receive the output electrical potentials and convert each output electrical potential to a corresponding resonance frequency varying signal. The output signal from each resonator varies in linear proportion to the resonator's corresponding frequency variation arising from the applied electrical potential. The frequency varying signals are multiplexed together into a single readout signal path that is monitored to determine variations in vibrational amplitude. A demodulation device deconvolves the multiplexed frequency varying signals to recover and uniquely identify the output electrical signal.

A nanoelectromechanical systems (NEMS) device and method for using the device provide for a movable member that includes a region of low conductivity over which an electric field is developed. A region width is within a factor of ten (10) of a thickness of the NEMS device. The region is formed between a junction that incorporates piezoelectric material. A first voltage is applied across the region which alters a width of an active portion of the region thereby adjusting a movement of the movable member induced by a second voltage. The second voltage is applied across the region to produce a strain on the active portion of the region. The strain results in a defined movement of the movable member.

The present invention relates to an apparatus for measuring a mass of a sample, using a nanoelectromechanical system (NEMS) arranged to receive the sample added onto a resonator of the NEMS and a microfluidic sample delivery and sample ionization system. The nanoelectromechanical system is located at an output of the ionization system. The nanoelectromechanical resonator system is highly sensitive and is capable of detecting masses in the single Dalton range.

Thin metallic films are used as the piezoresistive self-sensing element in microelectromechanical and nanoelectromechanical systems. The specific application to AFM probes is demonstrated.