The invention relates to the technical field of MEMS (Micro-electro-
mechanical System) integration
processing, in particular to a single-
surface friction power generator based on transverse friction and a preparation method of the single-
surface friction power generator. The single-
surface friction power generator is formed in a manner that two identical structures are arranged in a relatively and mutually horizontal friction manner, wherein each structure comprises five
layers; conducting
layers are arranged at the outermost
layers; thin film layers are adjacent to the conducting layers; thin film nano structure layers are arranged on the other sides of the thin film layers;
metal electrodes are arranged on the other sides of the thin film nano structure layers; and
metal electrode nano structure layers are arranged on the other sides of the
metal electrodes. The single-surface friction power generator has the advantages that compared with the traditional two-layer thin film power generator in a vertical direction, the single-layer structure uses friction in a horizontal direction, and
electrode outputs are in the same plane, so that subsequent
processing and integration are facilitated; the nano power generator and the preparation method thereof are simple in technology, low in cost, high in productivity, and easy to integrate and process;
mass production is available; and the novel structure effectively uses the friction in the horizontal direction in nature.