The invention belongs to the
chemical vapor deposition field, in particular to a device of a hot wire chemical vapor
diamond deposition device. The device comprises a
vacuum chamber, a vacuum obtaining
system, a cooling
system, an air circuit, a hot wire, a mechanical rotating mechanism, a base platform, a
control system, a power supply, and a Hall
ion source, wherein the Hall
ion source is fixedly installed at the top of the
vacuum chamber, the end part of the Hall
ion source is installed in the
vacuum chamber, the bottom of the Hall
ion source is installed at the outside of the vacuum chamber, connected to an
anode power supply, the air circuit and a cooling
water channel and hermetically communicated with the vacuum chamber, and a hole is arranged at the top of the vacuum chamber and used for connecting a
cathode power supply and sealing. The device improves the
ionization proportion of reaction gas, increases the synthesized
diamond SP3 structure, reduces the resistance of a heater strip by 30-35%, has clear
crystal grain
facet and compact structure, and greatly improves the quality of the synthesized
diamond.