The invention relates to an
electron cyclotron resonance (ECR)
plasma source having a linear
plasma discharge opening (9, 27, 28, 30), comprised of a
plasma chamber, inside of which a centered wave
distributor is provided, and having a multi-pole
magnetic field arrangement in the area of the linear plasma
discharge opening. The centered wave
distributor consists of at least two separate wave distributors (3, 4) that are placed inside a respective partial
plasma chamber (1, 2, 21, 22, 32, 23). A linear partial plasma
discharge opening (7, 8, 23, 24, 34, 35) and multi-pole
magnetic field arrangements (10, 11, 38, 39) are provided on each partial
plasma chamber (1, 2, 21, 22, 32, 23). The at least two linear plasma discharge openings (7, 8, 23, 24, 34, 35) are arranged with regard to one another in such a manner that, together, they form at least one plasma discharge opening (9, 27, 28, 30) of the ECR plasma source.