A surface defect measuring apparatus and method by microscopic scattering
polarization imaging is provided. The apparatus mainly comprises a
laser, a first converging lens, a rotary diffuser, a second converging lens, a diaphragm, a third converging lens, a pinhole, a fourth converging lens, a
polarizer, a half-wave plate, a polarizing
beam splitter, an X-Y translation stage, a sample, a
microscope lens, a quarter-wave plate, a micro-
polarizer array, a camera and a computer. The micro-
polarizer array is adopted to realize real-time microscopic scattering
polarization imaging of the surface defects; a polarization-degree image is calculated to improve the sensitivity for detecting the surface defects of the ultra-smooth element, and the effective detection of the surface defects of a high-reflective
coating element is also realized, and the requirement for
rapid detection of the surface defects of a meter-scale large-aperture ultra-smooth element can be met.