The invention provides an internal-external double-
electrode type miniature hemispherical
resonance gyroscope and a preparation method thereof. The internal-external double-
electrode type miniature hemispherical
resonance gyroscope comprises a single-
crystal silicon substrate, a central fixed supporting column, a miniature hemispherical
resonator, external electrodes, external-
electrode metal welding plates, a glass substrate,
metal leads, round
welding wire discs, external-electrode
metal connecting columns, internal electrodes and a seed layer. The internal-external double-electrode type miniature hemispherical
resonance gyroscope and the preparation method provided by the invention have the beneficial effects that an MEMS bulk
silicon processing process and a surface
silicon processing process are combined for manufacture; different driving and detection
modes and different working
modes can be provided, and the working in a
system needing complex control can be achieved; the internal electrodes and the external electrodes can be utilized for respectively carrying out driving and detection, the
parasitic capacitance between a driving electrode and a detection electrode can be reduced and the detection accuracy can be improved; and the metal leads and the round
welding wire discs are provided for the internal electrodes and the outer electrode so as to bring convenience for
signal application and
signal extraction.