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30results about How to "Peeling can be suppressed" patented technology

Substrate for use in a liquid crystal display and liquid crystal display using the same

The invention relates to a substrate for use in a liquid crystal display of a CF-on-TFT structure in which a color filter is formed on the side of an array substrate in which a switching element is formed, and has an object to provide a substrate for use in a liquid crystal display, which enables simplification of a manufacturing process typified by a photolithography process and has high reliability. The substrate for use in the liquid crystal display is constructed to include external connection terminals which include first terminal electrodes electrically connected to gate bus lines led out from a plurality of pixel regions arranged on a glass substrate in a matrix form, second terminal electrodes formed of forming material of a pixel electrode and directly on the glass substrate, and electrode coupling regions for electrically connecting the first and the second terminal electrodes, and which electrically connect an external circuit and the gate bus lines.
Owner:SHARP KK

MEMS device, liquid ejecting head, and liquid ejecting apparatus

A MEMS device includes a first substrate in which a first electrode layer, a dielectric layer, and a second electrode layer are stacked on a driving region in this order; and a second substrate which is disposed to face a surface on which the dielectric layer of the first substrate is stacked. The first electrode layer and the dielectric layer extend beyond the second electrode layer toward a non-driving region separated from the driving region, a first resin having elasticity is disposed in a region including an end of the second electrode layer in an extending direction of the dielectric layer, and the first substrate and the second substrate are fixed with an adhesive in a state where the elastically deformed first resin is sandwiched therebetween.
Owner:SEIKO EPSON CORP

Liquid crystal display device

A pixel electrode is formed on a TFT substrate, and a gate insulating film, an inorganic passivation film, a common electrode, and an alignment film are formed in this order thereover. A columnar spacer is formed to the counter substrate and is adapted to define a gap between the TFT substrate and the counter substrate. A through hole is formed in the gate insulating film of the TFT substrate, and the columnar spacer is disposed so as to cover a concave portion formed by the through hole. Since the area of contact between the columnar spacer and the TFT substrate is decreased, it is possible to suppress scraping of the alignment film and thus to prevent occurrence of bright spots.
Owner:JAPAN DISPLAY INC

Method for manufacturing a ruthenium film for a semiconductor device

InactiveUS6989304B1Reduce pressureEnhancing straight forwarding propertyTransistorSolid-state devicesGas phaseEngineering
In the method of manufacturing a semiconductor device according to this invention, when an interlayer insulating film is fabricated such that an opening is cylindrical and low-pressure and long-throw sputtering is used for forming a lower ruthenium electrode, a ruthenium film can be deposited on the side wall of a deep hole. Further, after removing the ruthenium film deposited on the upper surface of the interlayer insulating film, a dielectric material comprising, for example, a tantalum pentoxide film is deposited. Successively, an upper ruthenium electrode is deposited using, for example, Ru(EtCp)2 as a starting material and by chemical vapor deposition of conveying the starting material by bubbling. The upper ruthenium electrode can be formed with good coverage by using conditions that the deposition rate of the ruthenium film depends on the formation temperature (reaction controlling condition). This invention can provide a fine concave type capacitor having a ruthenium electrode.
Owner:RENESAS ELECTRONICS CORP

Electro-optical device, manufacturing method for electro-optical device, and electronic apparatus

A first electrode, a first insulating film, a second electrode, a second insulating film, and a pixel electrode are formed on a one surface side of a first substrate of an electro-optical device. The second electrode is electrically connected [to the first electrode] via a first contact hole that penetrates the first insulating film. The second electrode and the second insulating film configure a continuous flat surface, which is the surface on the opposite side to the first substrate, and the pixel electrode is electrically connected to the second electrode. Of the second insulating film, since an inside section positioned inside a concave portion caused by the first contact hole is connected to an outside section provided on the outside of the concave portion, peeling of the inside section is unlikely to occur
Owner:SEIKO EPSON CORP
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