In the method of manufacturing a
semiconductor device according to this invention, when an interlayer insulating film is fabricated such that an opening is cylindrical and low-pressure and long-throw
sputtering is used for forming a lower
ruthenium electrode, a
ruthenium film can be deposited on the side wall of a
deep hole. Further, after removing the
ruthenium film deposited on the upper surface of the interlayer insulating film, a
dielectric material comprising, for example, a
tantalum pentoxide film is deposited. Successively, an upper ruthenium
electrode is deposited using, for example, Ru(EtCp)2 as a starting material and by
chemical vapor deposition of conveying the starting material by bubbling. The upper ruthenium
electrode can be formed with good coverage by using conditions that the
deposition rate of the ruthenium film depends on the formation temperature (reaction controlling condition). This invention can provide a fine concave type
capacitor having a ruthenium electrode.