The invention discloses a
control system and method suitable for a micro-nano detection and
processing module. The
system includes a micro-nano dual-mode detection and
processing module, a three-coordinate
workbench, a PZT driver, a UMAC, a
charge amplifier, a lock-in
amplifier, an XY piezoelectric scanning bench, a
router, an upper computer, a CCD, an XY-direction displacement sensor, and a Z-direction displacement sensor. The UMAC is selected as a control core, and characteristics of a high-performance
servo ring, high
scalability and a high integration degree are adopted to realize
macro-micro linkage control. An
analog signal mode is adopted to ensure real-time performance of
signal processing and transmission, and a design requirement is satisfied. A
capacitive displacement sensor signal is amplified,
phase locking processing is performed, and the
signal is served as a closed-
loop control reference signal, a test result is accurate and the requirement to a test environment is low, and muN-level closed-
loop control can be realized. Through usage of the lock-in
amplifier, a
noise signal in the
capacitive displacement sensor test result is eliminated, which facilitates closed-loop precision control.