The invention discloses a calibration device of a
capacitance displacement sensor, and belongs to the technical field of sensor calibration. The technical problem that a calibration device for a
capacitance displacement sensor in the prior art is low in calibration precision is solved. The calibration device comprises a
capacitance displacement mechanism and an interferometer mechanism. The capacitance displacement mechanism comprises a calibration table base, a calibration table supporting frame, a sensor supporting frame, a driver, a calibration table static platform, a hinge, a calibration table dynamic platform, a measurement angle reflecting mirror, a
light guide element supporting frame, a
light guide element fixing base, a reference angle reflecting mirror, a
beam splitter mirror, a sensor fixing base, a capacitance sensor, a measured panel and a driver push rod. The interferometer mechanism comprises a single-axis
laser interferometer, an interferometer adjusting base, an interferometer supporting frame and an interferometer base. According to the device, the parallelism depth precision of a sensing face and a measured face of the existing calibration device for the capacitance displacement sensor is improved when the sensor is mounted, measurement errors caused by adjustment are reduced, and the calibration precision of the sensor is improved.