The invention discloses a tangential driving double-difference butterfly-wing
silicon microgyroscope and an application method thereof. The
silicon microgyroscope is of a
silicon-glass double-layer structure which is constituted by a silicon sensitive structure and a
glass electrode plate, the silicon sensitive structure comprises an external framework, an internal
coupling spring structure and two silicon sensitive subsidiary structures, each silicon sensitive subsidiary structure comprises four
inertial mass blocks which are connected to a supporting beam through a
cantilever beam, driving comb teeth are arranged on the
inertial mass blocks, a driving
electrode, a detecting
electrode and an
electrode welding disc are arranged on the
glass electrode plate, and detecting capacitors of thetwo silicon sensitive subsidiary structures constitute a double-difference slab detecting
capacitor. The application method comprises the step of additionally applying static electrostatic stiffness to a unilateral silicon sensitive structure to change a
modal control method of the
system modal frequency. By means of the tangential driving double-difference butterfly-wing silicon microgyroscope and the application method thereof, the limit of
normal displacement on driving amplitude and capacitive gaps can be effectively removed, the driving Q value can be effectively increased, the working state of the
gyroscope is improved, thus the sensitivity of the
gyroscope is improved, the bandwidth of the
gyroscope is increased, and the stability of the gyroscope is improved.