Micromechanical gyroscope bandwidth expanding method based on dipole compensation method
A micromachined gyroscope and compensation method technology, which is applied to gyroscope/steering sensing equipment, gyroscopic effect for speed measurement, instruments and other directions, which can solve the problem that the micromachined gyroscope cannot take into account the mechanical sensitivity and bandwidth, etc.
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[0075] A micromachined gyroscope bandwidth expansion method based on the dipole compensation method, which is implemented by the following steps:
[0076] 1) Determine the resonant angular frequency of the driving mode and the detection mode of the micromechanical gyroscope by means of frequency sweep;
[0077] 2) According to the results of the frequency sweep test of the micromechanical gyroscope driving mode and detection mode, the quality factor of the micromechanical gyroscope driving mode and detection mode is calculated, and the specific calculation formula is as follows:
[0078] Q x = ω x ω x + 3 ...
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