The invention discloses a multi-physical measurement sensor
chip and a production method thereof. The
chip comprises a substrate as well as at least two kinds of sensors of a temperature sensor, a
humidity sensor and a
pressure sensor which are integrated on the substrate. The
pressure sensor is formed by electrically-connected
resistor elements; the
humidity sensor can be of a capacitive type or a resistance type;
thermistor wires are arranged on the periphery of the
pressure sensor and the
humidity sensor to form a temperature sensor; the temperature sensor is provided with a resistance trimming circuit; a micro chamber is etched in the back of the substrate, which corresponds to the pressure sensor; the micro chamber can be sealed or not sealed. The invention also discloses a production process of the sensor
chip. According to the production process, firstly, depositing an elastic film on the surface of the substrate, and then using processes such as magnetron
sputtering and patterning (including photoetching, peeling and
etching) to obtain the final sensor chip. The sensor chip has the advantages of being low in cost and
power consumption, easy to produce, wide in applicability and capable of achieving multi-physical measurement of a
single chip and the like.