Silicon micromachined resonant accelerometer

Abstract

The invention provides a silicon micromachined resonant accelerometer. One end of each force arm of a micro-mechanical lever mechanism, which is far away from a corresponding anchoring body, is fixedon a mass block; the moving components of resonators are connected with the force arms and are driven to move by the force arms; the resonators are symmetrically arranged with respect to the middle line of the mass block; the displacement directions of the moving components of the two resonators which are symmetrical to each other after the moving components bear forces are opposite to each other;the resonators are symmetrically arranged with respect to the center line of the mass block, so that the resonant frequencies of the operating modes of the two resonators are equal; the two resonators are distributed at two ends of the mass block, so that the mutual interference of resonant structures can be greatly reduced, and the noise level of the accelerometer can be decreased; since the resonators are located at the two ends of the mass block, the asymmetric vibration of the resonant structures which is caused by the asymmetry of the machining of the mass block can be greatly reduced; and therefore, drift caused by process error, temperature change and environmental vibration can be greatly reduced, and the interference of environmental factors can be effectively suppressed from thestructure of the accelerometer, and the sensitivity of the accelerometer can be effectively improved.

Description

technical field [0001] The invention relates to an accessory for an inertial navigation system, in particular to a silicon micro-resonance accelerometer. Background technique [0002] The silicon micromechanical capacitive accelerometer is an inertial sensor that detects the magnitude of the external acceleration. It converts the change of the external acceleration into the motion of the resonator of its own resonator, and then outputs the frequency signal. In recent years, with the advancement of micro-processing technology, the accuracy of silicon micro-accelerometers has been continuously improved. It has many advantages such as high accuracy and anti-interference ability, and can be widely used in high-precision fields such as military navigation and deep space detection. Extremely broad application prospects. [0003] Accelerometer, as a key component of the inertial navigation system, directly determines the performance of the inertial navigation system. In today's m...

AI Technical Summary

Problems solved by technology

[0005] A silicon microresonant accelerometer provided by the present invention aims to solve the technical problems of unreasonable structure and low precision of the accelerometer in the prior art

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