Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Piezoresistive micromechanical sensor component and corresponding measuring method

A technology of micro-mechanical sensor and measurement method, which is applied in the direction of measuring device, acceleration measurement, speed/acceleration/shock measurement, etc., can solve the problems of process consumption, etc., and achieve the effect of favorable cost, high mechanical sensitivity, and simplified technical realization

Inactive Publication Date: 2012-11-21
ROBERT BOSCH GMBH
View PDF4 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Especially the narrowest possible trench isolation (STI) is required between beams PR1, B, PR2, which means increased process costs

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Piezoresistive micromechanical sensor component and corresponding measuring method
  • Piezoresistive micromechanical sensor component and corresponding measuring method
  • Piezoresistive micromechanical sensor component and corresponding measuring method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0025] In the figures, identical reference numbers designate identical or functionally identical components.

[0026] figure 1 is a top view of a piezoresistive micromechanical sensor device in the form of a micromechanical acceleration sensor device according to a first embodiment of the invention, and Figure 2a -c is based on figure 1 A cross-section along lines AA1', BB' and CC' of a piezoresistive micromechanical sensor device in the form of a micromachined acceleration sensor device.

[0027] exist figure 1 , reference numeral 5 shows a piezoresistive micromachined acceleration sensor. Starting from the substrate 1, two uniformly doped piezoresistive beams 1a, 1b extend to the anti-seismic mass 3, whereby the anti-seismic mass is connected to the substrate 1 via the beams 1a, 1b. There is a cavity K below the beams 1 a , 1 b and the seismic mass 3 .

[0028] The insulating trench G between the piezoresistive beams 1 a , 1 b can also be embodied as a narrow insula...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The present invention relates to a piezoresistive micromechanical sensor component and to a corresponding measuring method. The piezoresistive micromechanical sensor component comprises: a substrate (1); a seismic mass (3) which is suspended from the substrate such that it can be deflected; at least one piezoresistive bar (1a, 1b; 1a', 1b') which is provided between the substrate and the seismic mass and is subject to a change in resistance when the seismic mass is deflected; wherein the piezoresistive bar has a lateral and / or upper and / or lower conductor track (2a, 2b; 2a', 2b') which at least partially covers the piezoresistive bar and extends into the region of the substrate; and a measuring device (M1; M2; M1'; M1'') which is electrically connected to the substrate and to the conductor track and is designed to measure the change in resistance over a circuit path which runs from the substrate through the piezoresistive bar and from the piezoresistive bar through the lateral and / or upper and / or lower conductor track.

Description

technical field [0001] The invention relates to a piezoresistive micromechanical sensor device and a corresponding measuring method. Background technique [0002] Although applicable to any piezoresistive micromechanical sensor device, the invention and the problem on which it is based are explained with reference to a piezoresistive micromechanical acceleration sensor. [0003] Current acceleration sensors are usually analyzed capacitively. But equally practical piezoresistive analysis offers greater potential in terms of the ever-wider miniaturization that is being pursued. In principle, in the case of piezoresistive acceleration sensors (referred to here as piezoresistive acceleration sensors), the following two variants are to be distinguished. [0004] A variant consists in structured doping, in which the piezoresistors are doped at those points on the crossbar at which the maximum mechanical stress occurs in the event of a deflection. [0005] Another variant consis...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/08G01P15/12
CPCG01P15/123G01P15/0802G01P15/08G01P15/12G01P15/09
Inventor R.诺伊尔C.雷蒂希A.特劳特曼D.C.梅塞尔A.鲁曼M.恩格泽A.费伊
Owner ROBERT BOSCH GMBH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com