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Optical fiber sensing probe and preparation method

A technology of optical fiber sensing probe and sensitive film, which is applied in the direction of measurement, measuring device, instrument, etc. by measuring the change force of the optical properties of the material when it is stressed, and can solve the problems of complex process, immature technology, material temperature characteristics and mechanical properties. Poor characteristics and other problems, to achieve high reflectivity, reduce production costs, and good temperature characteristics

Inactive Publication Date: 2016-04-20
PUTIAN UNIV
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Problems solved by technology

The diaphragm structure can theoretically obtain higher sensitivity, but there are deficiencies such as immature technology, complicated process, and poor temperature and mechanical properties of materials in the production of high-sensitivity diaphragms on the fiber end face.

Method used

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  • Optical fiber sensing probe and preparation method
  • Optical fiber sensing probe and preparation method

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Embodiment Construction

[0019] The principles and features of the present invention are described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.

[0020] Such as figure 1 As shown, an optical fiber sensing probe includes a glass body 210, a groove is provided on one side of the glass body 210, and a borosilicate sensitive film 220 is provided at the notch of the groove; the mechanical sensitivity of the borosilicate sensitive film is high , the resolution of pressure measurement is high, the minimum resolution is up to 62Pa, the high temperature stability is better, the pressure measurement can be carried out within 1000°C, and the sensitivity reaches 0.51nw / Kpa, the borosilicate sensitive film 220 and the glass body 210 A reflective film 230 is arranged between them, the borosilicate sensitive film 220 is integrally connected with the reflective film 230, the...

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Abstract

The invention relates to an optical fiber sensing probe and a preparation method. The optical fiber sensing probe comprises a glass body, wherein a groove is formed in one side of the glass body; a boron-silicon sensitive thin film is arranged at a groove opening of the groove; a reflecting film is arranged between the boron-silicon sensitive thin film and the glass body; the boron-silicon sensitive thin film and the reflecting film are integrally molded; the groove is sealed by the reflecting film; a vacuum cavity is formed in the glass body. Compared with the prior art, the optical fiber sensing probe has the advantages of high mechanical sensitivity, high reflecting rate, high temperature resistance and small temperature effect and is suitable for pressure measurement under different temperature environments; large-scale and integrated production can be realized, so that the production efficiency of sensor chips is improved and the cost is reduced.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensor elements, in particular to a Fabry-Perot composite cavity optical fiber sensing probe for measuring pressure and a preparation method thereof. Background technique [0002] The Fabry-Perot (F-P) cavity miniature fiber optic pressure sensor usually has a quartz capillary structure and a diaphragm structure. Due to the thick capillary wall, the pressure sensor with quartz capillary structure has low sensitivity to pressure perception, and due to the influence of factors such as the gas in the chamber and the thermal expansion and contraction of the quartz tube, it is highly sensitive to temperature, so it is suitable for measurement accuracy requirements. Wide range of pressure measurements without high. Theoretically, the diaphragm structure can obtain higher sensitivity, but there are disadvantages such as immature technology, complicated process, and poor temperature and mechanical ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L1/24
CPCG01L1/242
Inventor 郑志霞黄元庆冯勇建黄国树
Owner PUTIAN UNIV
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