The invention provides a periodic cross
waveguide structure, and an electro-optical modulation structure and an MZI (Mach-Zehnder Interference) structure both utilizing the same. The periodic cross
waveguide structure is in the shape of
ridge; strip-like interdigital n-type
Si doped zones are formed at position, along a
waveguide extension direction, at the
ridge-shaped waveguide center; p-type SiGe doped zones are formed among the interdigital spaces; the n-type
Si doped zones and the p-type SiGe doped zones are arranged in a periodic cross manner; the n-type
Si doped zones are connected at one side of the interdigital spaces thereof and are connected with the bottom of the
ridge-shaped waveguide center; gaps are formed between the interdigital bottoms of the n-type Si doped zones and theupper surface of the n-type Si doped zones connected at the bottom of ridge-shaped waveguide center, the p-type SiGe doped zones are arranged in the gaps, and thus, the p-type SiGe zones formed amongthe interdigital spaces are connected mutually. SiGe material carrier effective
mass is reduced,
free carrier plasma dispersion effect is improved, change of reflective index of the SiGe material isincreased, and accordingly,
modulation efficiency, modulation speed, and modulation
power consumption are optimized, and the effect of reducing size while improving modulation performance is achieved.