The invention discloses an MEMS
capacitor switch with a PN junction, and belongs to the technical field of
electronics. The MEMS
capacitor switch is characterized in that a longitudinal PN junction structure is additionally arranged between an upper drive
electrode and a lower drive
electrode of the MEMS
capacitor switch; when the switch is in the Up state, drive
voltage is not applied between the upper drive
electrode and the lower drive electrode, and an
electric contact point does not make contact with a
signal line; when the switch is in the Down state, the upper drive electrode is pulled downwards under the action of the drive
voltage, the
electric contact point makes contact with the
signal line, and meanwhile the longitudinal
semiconductor PN junction is in the reversal of biasing state. When the MEMS capacitor switch with the PN junction works in the Down state,
charge injection and accumulation cannot be generated, the bonding failure problem of the upper drive electrode and the lower drive electrode is solved, the MEMS capacitor switch is made to work under the sufficient drive
voltage, it can be guaranteed that the
electric contact point tightly makes contact with the
signal line, and eventually reliability and stability of the MEMS capacitor switch can be improved.