Multi-structure linkage enclosed protecting
capacitance pressure sensor and its manufacturing method relate to a
pressure sensor, supplying sensor with good hermetical characteristic, stable performance, excellent
bearing capacity, high
linearity and sensibility, and technical method with good versatility and low manufacturing cost, having prime
silicon slice, glass substrate, enclosed glass,
silicon film
electron and
capacitance cavity
electron. Wash, dry, oxidize the prime
silicon slice, erode
capacitance cavity, then spread to form P+layer or PN node of film, creating
metal electron; isolation glass is made on
metal electron, prime silicon slice and glass slice is linked; dual-plane
polishing glass slice used for enclosing glass is linked with protecting silicon slice; enclosing glass is isolation wall has
static electricity linkage with enclosing glass. Use linkage structure of two pieces of silicon and two pieces of glass, and multi-structure
static electricity linkage technique enclosing capacitance cavity, to produce capacitance cavity type micro
pressure sensor, avoiding effectively the problem of capacitance cavity enclosing linkage.