The invention provides a manufacturing method of a
silicon epitaxial
wafer of a large-power PIN device. The method is that a highly As-doped N type <100> polished
wafer of which the resistivity does not exceeds 0.003
ohm / cm and local flatness does not exceeds 1.5mm and the rear surface is free of a back seal
oxide layer is adopted. The manufacturing method of the
silicon epitaxial
wafer of the large-power PIN device has the advantages that 1,
polycrystalline silicon is transferred from a
graphite base to the rear surface of a substrate by the
mass transfer principle, so as to reach the back enveloping purpose; 2, proper
atmospheric corrosion flow and
atmospheric corrosion time are selected and the
gas phase concentration of
atmospheric corrosion impurities in an epitaxial
reaction chamber is reduced so as to reduce self
doping under epitaxial growth; 3, after atmospheric
corrosion, variable temperature and flow
hydrogen is selected to purge the epitaxial
reaction chamber; 4, during the growth of a first epitaxial layer, an intrinsic epitaxial layer grows under relatively low temperature to envelope the high-concentration
substrate surface, and the growth temperature, rate and time are controlled to reach an ideal enveloping layer; and 5, during the growth of a second epitaxial layer, an epitaxial layer of which the
surface concentration is below 10E13cm-3 grows under a low temperature.