Miniature metal fully-sealed servo circuit of quartz flexible accelerometer and processing method of servo circuit

Abstract

The invention provides a miniature metal fully-sealed servo circuit of a quartz flexible accelerometer and a processing method of the servo circuit. The circuit comprises a capacitance-voltage converter, a transconductance / compensation amplifier and a feedback network, the capacitance-voltage converter comprises a differential capacitance detector and an integral network, the differential capacitance detector is connected with a differential capacitance sensor of an accelerometer gauge outfit, the differential capacitance detector, the integral network and the transconductance / compensation amplifier are connected in sequence, and the transconductance / compensation amplifier is connected with a torquer of the accelerometer gauge outfit; and all components of the servo circuit are integratedon a ceramic substrate through a thick film hybrid integration process, and the servo circuit is packaged in a metal full-sealed mode. According to the servo circuit, in a metal parallel seam packaging form, of the quartz flexible accelerometer, the servo circuit is full-sealed, and the problems in reliability and heat radiation of the servo motor in the extreme environment are solved.

Description

technical field [0001] The invention relates to the design technology of a semiconductor hybrid integrated circuit, in particular to a servo circuit of a miniature metal fully-sealed quartz flexible accelerometer and a processing method thereof. Background technique [0002] Quartz flexible accelerometer, as an inertial sensitive element, is one of the key devices in inertial navigation and guidance systems. It is widely used in navigation and guidance systems such as launch vehicles, missiles, spacecraft, and ships. The quartz flexible accelerometer servo circuit is an important part of the quartz flexible accelerometer, and its performance directly affects the measurement accuracy, stability, and final navigation accuracy of the accelerometer system. As the inertial navigation system has higher and higher requirements for accelerometers in terms of light weight, large range, matching, and high reliability, the servo circuit of the traditional quartz flexible accelerometer ...

AI Technical Summary

Problems solved by technology

[0004] 1. The circuit is bulky and cannot meet the lightweight requirements of the inertial navigation system

[0005] The servo circuit of the traditional quartz flexible accelerometer is large in size and mass, with an external dimension of Φ25.4mm×5.7mm and a mass of 9 grams. The miniaturization of components is low, which limits the development of lightweight inertial navigation systems.

[0006] 2. The output current capability of the circuit is small, which cannot meet the large range requirements of the acceleration sensor

[0007] The current output capability of the traditional quartz flexible accelerometer servo circuit is weak, and the acceleration measurement range is small, which cannot meet the development direction of the accelerometer with a large range.

Although the transconductance amplification module built with discrete components can improve the output capability of the circuit current, its large size, low integration, and low reliability greatly limit the development of accelerometer miniaturization.

[0008] 3. Poor sealing performance, unable to meet extreme environmental requirements

[0009] The traditional quartz flexible accelerometer servo circuit is packaged with a semicircular ceramic cover plate and epoxy glue, which is a non-airtight package. If the circuit is directly in a humid environment for a long time, the internal atmosphere will have too much water vapor, which will affect its reliability. , higher requirements for subsequent system-in-package (accelerometer sensor and servo circuit)

[0010] 4. The range of dynamic characteristics is poorly adjusted, and system adjustment cannot be realized

For the inertial navigation system, the dynamic parameters of the traditional servo circuit are fixed, the matching range cannot be adjusted, and the matching requirements with the acceleration sensor are high, and it cannot be adjusted outside the circuit, which restricts the use conditions of the circuit

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