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2960 results about "Capacitance transducer" patented technology

Capacitive Transducers. The capacitive transducer is the capacitor with variable capacitance. The capacitive transducer consists of two parallel metal plates that are separated by the dielectric material such as air. In a normal capacitor, the distance between the two plates is fixed, but in capacitance transducers the capacitance is variable.

Capacitive position sensing for transducers

ActiveUS20160094917A1Avoid speaker damageReduce and eliminate non-axial rocking motionTransducer protection circuitsDiaphragm mounting/tensioningEngineeringLoudspeaker
A micro speaker having a capacitive sensor to sense a motion of a speaker diaphragm, is disclosed. More particularly, embodiments of the micro speaker include a conductive surface of a diaphragm facing conductive surfaces of several capacitive plate sections across a gap. The diaphragm may be configured to emit sound forward away from a magnet of the micro speaker, and the capacitive plate sections may be supported on the magnet behind the diaphragm. In an embodiment, the gap provides an available travel for the diaphragm, which may be only a few millimeters. A sensing circuit may sense capacitances of the conductive surfaces to limit displacement of the diaphragm to within the available travel.
Owner:APPLE INC

Method and apparatus for in-line oxide thickness determination in chemical-mechanical polishing

In-line thickness measurement of a dielectric film layer on a surface of a workpiece subsequent to a polishing on a chemical-mechanical polishing machine in a polishing slurry is disclosed. The workpiece includes a given level of back-end-of-line (BEOL) structure including junctions. The measurement apparatus includes a platen and an electrode embedded within the platen. A positioning mechanism positions the workpiece above the electrode with the dielectric layer facing in a direction of the electrode. A slurry dam is used for maintaining a prescribed level of a conductive polishing slurry above the electrode, the prescribed level to ensure a desired slurry coverage of the workpiece. A capacitance sensor senses a system capacitance C in accordance with an RC equivalent circuit model, wherein the RC equivalent circuit includes a resistance R representative of the slurry and workpiece resistances and the system capacitance C representative of the dielectric material and junction capacitances. Lastly, a capacitance-to-thickness converter converts the sensed capacitance to a dielectric thickness in accordance with a prescribed system capacitance / optical thickness calibration, wherein the prescribed calibration corresponds to the given level of BEOL structure of the workpiece.
Owner:IBM CORP
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