The invention provides a
mask aligner
mask platform adopting the magnetic suspension technology. The
mask aligner mask platform mainly comprises a precision slideway, a base, a suspension and the like, wherein the inside of the suspension is provided with an
electromagnet which combines with a vortex displacement sensor to realize that the suspension is suspended above the slideway stably; the
stator of a linear
electric motor is fixed on the base, the rotor of the linear
electric motor is fixed on the suspension; and the slideway surface is provided with a
linear scale which combines with a
linear scale reading-head arranged on the suspension to realize the precise and linear positioning motion of the suspension. The magnetic suspension mask aligner mask platform provided by the invention utilizes electromagnetic attraction and electromagnetic
linear drive to ensure that the mask aligner mask platform can perform precise and fast reciprocating linear positioning motion, realize the functions of ultra-clean, high-speed, long-distance and precise positioning motion and the like which can not be realized by using the traditional scheme using a rotary
servo motor for drive, a precision ball lead screw for transmission and a slideguide for support, and have higher suspension stiffness and better load-bearing characteristic than the
gas phase suspension mask aligner mask platform.