The invention relates to a microscopic interference detecting device based on synchronous
carrier phase shift and a detecting method of the microscopic interference detecting device, which belong to the field of optical interference detection and solve the problems that the existing synchronous
carrier phase shift interference
microscope method is low in light
utilization rate and complex in data process. The microscopic interference detecting device comprises an optical source, a linear polarizing film, a first polarization splitting
prism, a first collimation and beam expansion
system, an object to be detected, a microobjective, a correcting objective, a first mirror, a second mirror, a second collimation and beam expansion
system, a second polarization splitting
prism, a
lambda / 4 wave plate, a rectangular window, a first flourier lens, a one-dimensional period optical
grating, a second flourier lens, a polarizing film set, an
image sensor and a computer. The detecting method comprises the steps that two phase shift interference images are obtained through once
exposure collection after a defocused
grating splitting technique and a polarization modulating technique are combined, and
phase retrieval of an object is achieved by eliminating a
zero frequency component in a
differential phase reduction method. The microscopic interference detecting device based on the synchronous
carrier phase shift and the detecting method of the microscopic interference detecting device, disclosed by the invention, are suitable for shape measurement of small objects.