The invention discloses a
nanowire cold cathode electron source array with a self-aligned focusing structure and a manufacturing method thereof. The
electron source array structure comprises a substrate, a bottom
cathode electrode strip, a
bottom gate electrode strip, an insulating layer configured to cover the above
electrode strips, an annular top gate electrode, a top
cathode electrode, a focusing electrode, and a circular
nanowire cold cathode array. The bottom
cathode electrode strip and the
bottom gate electrode strip are arranged on the substrate and are positioned in parallel with each other. The annular top gate electrode, the top
cathode electrode and the focusing electrode are manufactured above the insulating layer and are connected with the bottom corresponding electrode strips through
etching through holes in the insulating layer. The circular
nanowire cold cathode array is manufactured on the top
cathode electrode. The invention further discloses a manufacturing method of the nanowire cold cathode
electron source array. According to the technical scheme of the invention, the nanowire cold cathode
electron source array is provided with the self-aligned focusing structure, so that the row-by-row addressing function can be realized. The manufacturing method is simple, and the prepared nanowire cold cathode
electron source array is good in capability of regulating and controlling electron emission and focusing electron beams. Therefore, the nanowire cold cathode
electron source array and the manufacturing method thereof have an important application prospect in the aspect of flat plate X-
ray sources.