The invention discloses a growth method for a light-emitting
diode epitaxial
wafer, and belongs to the technical field of semiconductors. The method comprises the step: sequentially growing a low-temperature buffering layer, a high-temperature buffering layer, an N-type layer, an
active layer, an electronic
blocking layer and a P-type layer on a substrate. The
active layer comprises a first sub-layer and a second sub-layer, and the growth atmospheres of a
quantum well layer in the first sub-layer, a
quantum barrier layer in the first sub-layer, a
quantum well layer in the second sub-layer and a quantum
barrier layer in the second sub-layer are sequentially N2 and H2
mixed gas, pure H2, pure N2, and N2 and H2
mixed gas. The
quantum well layer in the first sub-layer employs a
variable pressure and variable temperature growth mode, and the quantum
barrier layer in the first sub-layer employs a high-pressure and high-temperature growth mode. The
quantum well layer in the second sub-layer employs a low-pressure and low-temperature growth mode, and the quantum barrier layer in the second sub-layer employs a
variable pressure growth mode. The quantum barrier layer in the first sub-layer employs trimethyl
gallium as a
gallium source. The method improves the light-emitting efficiency.