A method of forming a
metal nitride film using
chemical vapor deposition (CVD), and a method of forming a
metal contact and a
semiconductor capacitor of a
semiconductor device using the same, are provided. The method of forming a
metal nitride film using
chemical vapor deposition (CVD) in which a metal source and a
nitrogen source are used as a precursor, includes the steps of inserting a
semiconductor substrate into a
deposition chamber, flowing the metal source into the
deposition chamber, removing the metal source remaining in the
deposition chamber by
cutting off the inflow of the metal source and flowing a purge gas into the deposition chamber,
cutting off the purge gas and flowing the
nitrogen source into the deposition chamber to react with the metal source adsorbed on the semiconductor substrate, and removing the
nitrogen source remaining in the deposition chamber by
cutting off the inflow of the
nitrogen source and flowing the purge gas into the deposition chamber. Accordingly, the metal
nitride film having low resistivity and a low content of Cl even with excellent step coverage can be formed at a temperature of 500° C. or lower, and a semiconductor
capacitor having excellent leakage current characteristics can be manufactured. Also, a deposition speed, approximately 20 A / cycle, is suitable for
mass production.