A method for fabricating a
photomask includes the steps of forming a phase shift layer, a light-shielding layer, and a negative
resist layer in that order on a transparent substrate, forming a first
resist pattern including a pattern corresponding to a transfer pattern by performing first
exposure and development on the negative
resist layer, forming a light-shielding pattern by
etching the light-shielding layer using the first resist pattern as a
mask, removing the first resist pattern, and then forming a positive resist layer thereon, forming a second resist pattern including a pattern corresponding to a light-absorbing pattern by performing second
exposure and development on the positive resist layer, and forming a phase shift pattern by
etching the phase shift layer using the second resist pattern as a
mask.