The invention relates to a device capable of carbonizing
tantalum sheets, and belongs to the technical field of
semiconductor material preparation. The device and the method aim to overcome the defectthat an existing
tantalum sheet
carbonization device cannot distinguish the
tantalum sheet
carbonization conditions before and after
carbonization. The device capable of carbonizing the plurality oftantalum sheets simultaneously comprises a
crucible body, a
crucible upper cover, tantalum sheet brackets, an insulating layer
cushion block and an insulating layer shell; and the tantalum sheet brackets are arranged in the
crucible body in a stack mode, numbers are engraved on the outer walls of the tantalum sheet brackets, bosses are machined on the inner walls of the tantalum sheet brackets, the crucible upper cover covers the crucible body, and the insulating layer
cushion block and the insulating layer shell are arranged outside the crucible body in a sleeving mode. The method capable ofcarbonizing the plurality of tantalum sheets simultaneously comprises the steps that carbon
powder and the tantalum sheets are placed into the tantalum sheet brackets according to the sequence of thecarbon
powder, the tantalum sheets and the carbon
powder, the crucible upper cover is covered, the insulating layer is placed, heating is conducted, and the tantalum sheets are carbonized for a certain period of time at a certain carbonization temperature. The tantalum sheets are distinguished through the marks on the tantalum sheet brackets, and whether tantalum sheet carbonization reaches the standard or not is observed by comparing the weights of the tantalum sheets before and after carbonization.