The invention discloses an
irradiation resistant multi-interdigital
CMOS device, belonging to the technical field of
electron and comprising an active area, an STI area and a grid
electrode, wherein the grid
electrode is connected with the active area and the STI area and is in a multi-interdigital shape. The
irradiation resistant multi-interdigital
CMOS device is characterized in that the width of the active area along the transverse direction of the active area is longer than the width of the grid
electrode along the transverse direction of the active area within the range of the active area; preferably, inner contour lines of root parts of two adjacent fingers are not in a fold line shape with each break angle of 90 degrees, and outer contour lines of root parts of two fingers positioned on the end part of the
irradiation resistant multi-interdigital
CMOS device are not in a right-angle shape. The irradiation resistant multi-interdigital CMOS device can effectively reduce the grid series resistance, thereby enhancing the performance of a circuit; and in addition, the invention also reduces the domain occupying area, thereby enhancing the integration level of a
chip.