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METHOD OF PE-ALD OF SiNxCy AND INTEGRATION OF LINER MATERIALS ON POROUS LOW K SUBSTRATES

A method of depositing a SiNxCy liner on a porous low thermal conductivity (low-k) substrate by plasma-enhanced atomic layer deposition (PE-ALD), which includes forming a SiNxCy liner on a surface of a low-k substrate having pores on a surface thereon, in which the low-k substrate is repeatedly exposed to a aminosilane-based precursor and a plasma selected from nitrogen, hydrogen, oxygen, helium, and combinations thereof until a thickness of the liner is obtained, and wherein the liner is prevented from penetrating inside the pores of a surface of the substrate. A porous low thermal conductivity substrate having a SiNxCy liner formed thereon by the method is also disclosed.
Owner:GLOBALFOUNDRIES INC

Noise attenuating sandwich composite panel

InactiveUS6179086B1Highly effective noise absorptionLow weight and densityCeilingsWallsFibrous compositesEngineering
A sandwich composite panel (2) provides a load bearing structural member as well as noise protection, especially for a helicopter fuselage cell or cabin. The panel (2) includes an inner honey-comb core (6) made up of hollow cell bodies (4) extending trans-versely and sandwiched between first and second cover skins (8, 10) of fiber composite material. In order to achieve a low weight, a simple manufacturing, and good noise absorption, at least one of the cover skins (8) adapted to face the main source of noise (H) is made up of an open mesh fiber composite net (12) and a flexible cover film (16) applied on the outer surface of this fiber composite net (12). The net (12) has a smaller mesh size than the inner cross-sectional size of the hollow cell bodies (4).
Owner:AIRBUS HELICOPTERS DEUT GMBH
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