The invention discloses an integrated composite treatment method for in-situ PVD
film coating after
alloy steel surface
nitriding. Firstly, a matrix is ground, polished and subjected to ultrasonic cleaning, and then the surface of the matrix is subjected to
plasma cleaning and
etching through an arc enhanced type
glow discharge technology; then,
ion nitriding treatment is performed, and a
nitriding layer is obtained; and finally, under the conditions of similar
temperature and pressure, advanced
plasma auxiliary arc
film coating treatment is performed in situ,
negative bias voltage is applied to the matrix, and a hard film is obtained on the nitriding layer. According to the method, due to the fact that storage and
programming summarizing are performed on the same device, under the conditions of similar
temperature and pressure, a PN-PVD composite treatment process is integrally performed, high-density
plasma performs cleaning and
etching on the matrix in the nitriding process, the nitriding speed is increased, and an electronic
heating effect is also generated on the early growth stage of a film layer; and by means of the composite treatment process, the adhesiveness between a
coating and the matrix is remarkably improved, the abrasion-resistant performance of the
coating is improved, and the comprehensive performance of
coating tools, molds and mechanical parts is effectively improved.